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Farro F. Kaveh
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Palo Alto, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate alignment system
Patent number
8,744,624
Issue date
Jun 3, 2014
KLA-Tencor Corporation
Farro Kaveh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated electronic hardware for wafer processing control and dia...
Patent number
6,622,286
Issue date
Sep 16, 2003
Lam Research Corporation
Tuan Ngo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated full wavelength spectrometer for wafer processing
Patent number
6,526,355
Issue date
Feb 25, 2003
Lam Research Corporation
Tuqiang Ni
G01 - MEASURING TESTING
Information
Patent Grant
Wafer atmospheric transport module having a controlled mini-environ...
Patent number
6,364,762
Issue date
Apr 2, 2002
Lam Research Corporation
Farro F. Kaveh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for pressure control in vacuum processors
Patent number
6,142,163
Issue date
Nov 7, 2000
Lam Research Corporation
Brian K. McMillin
G05 - CONTROLLING REGULATING
Information
Patent Grant
Techniques for reducing particulate contamination on a substrate du...
Patent number
5,961,724
Issue date
Oct 5, 1999
Lam Research Corporation
Farro Kaveh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for pressure control in vacuum processors
Patent number
5,803,107
Issue date
Sep 8, 1998
Lam Research Corporation
Farro Frank Kaveh
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method and apparatus for pressure control in vacuum processors
Patent number
5,758,680
Issue date
Jun 2, 1998
Lam Research Corporation
Farro Frank Kaveh
G05 - CONTROLLING REGULATING