Farrokh Ayazi

Person

Smyrna, GA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Acoustically decoupled MEMS devices
- Patent number 11,777,468
- Issue date Oct 3, 2023
- Georgia Tech Research Corporation
- Farrokh Ayazi
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Accelerometer contact microphones and methods thereof
- Patent number 11,678,113
- Issue date Jun 13, 2023
- Georgia Tech Research Corporation
- Farrokh Ayazi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrate-decoupled high-coriolis-coupling pitch/roll gyroscope
- Patent number 11,644,313
- Issue date May 9, 2023
- Georgia Tech Research Corporation
- Haoran Wen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Comb-driven substrate decoupled annulus pitch/roll BAW gyroscope wi...
- Patent number 11,566,898
- Issue date Jan 31, 2023
- Georgia Tech Research Corporation
- Haoran Wen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Distributed-mode beam and frame resonators for high frequency timin...
- Patent number 11,533,042
- Issue date Dec 20, 2022
- Georgia Tech Research Corporation
- Anosh Daruwalla
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
MEMS inertial measurement apparatus having slanted electrodes for q...
- Patent number 11,280,612
- Issue date Mar 22, 2022
- Georgia Tech Research Corporation
- Farrokh Ayazi
- G01 - MEASURING TESTING
Information Patent Grant
MEMS inertial measurement apparatus having slanted electrodes for q...
- Patent number 11,280,613
- Issue date Mar 22, 2022
- Georgia Tech Research Corporation
- Farrokh Ayazi
- G01 - MEASURING TESTING
Information Patent Grant
Integrated atomic beam collimator and methods thereof
- Patent number 11,205,524
- Issue date Dec 21, 2021
- Georgia Tech Research Corporation
- Chandra Raman
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Comb-driven substrate decoupled annulus pitch/roll BAW gyroscope wi...
- Patent number 11,137,250
- Issue date Oct 5, 2021
- Georgia Tech Research Corporation
- Haoran Wen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for frequency trimming a microelectromechanical resonator
- Patent number 10,947,111
- Issue date Mar 16, 2021
- Georgia Tech Research Corporation
- Benoit Hamelin
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Pitch/roll annulus gyroscope with slanted quadrature tuning electro...
- Patent number 10,921,123
- Issue date Feb 16, 2021
- Georgia Tech Research Corporation
- Haoran Wen
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Method and system of dual-mode actuation and sensing for real-time...
- Patent number 10,830,790
- Issue date Nov 10, 2020
- Georgia Tech Research Corpoation
- Arashk Norouz Pour Shirazi
- G01 - MEASURING TESTING
Information Patent Grant
MEMS inertial measurement apparatus having slanted electrodes for q...
- Patent number 10,634,499
- Issue date Apr 28, 2020
- Georgia Tech Research Corporation
- Farrokh Ayazi
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for operation of vibratory gyroscopes
- Patent number 10,466,068
- Issue date Nov 5, 2019
- Georgia Tech Research Corporation
- Mojtaba Hodjat-Shamami
- G01 - MEASURING TESTING
Information Patent Grant
Micro-hemispherical resonators and methods of making the same
- Patent number 10,393,525
- Issue date Aug 27, 2019
- Georgia Tech Research Corporation
- Farrokh Ayazi
- G01 - MEASURING TESTING
Information Patent Grant
Method and system of dual-mode actuation and sensing for real-time...
- Patent number 10,191,079
- Issue date Jan 29, 2019
- Georgia Tech Research Corporation
- Arashk Norouz Pour Shirazi
- G01 - MEASURING TESTING
Information Patent Grant
Bulk acoustic wave accelerometers
- Patent number 10,036,764
- Issue date Jul 31, 2018
- Georgia Tech Research Corporation
- Farrokh Ayazi
- G01 - MEASURING TESTING
Information Patent Grant
Bulk acoustic wave gyroscope with spoked structure
- Patent number 9,970,764
- Issue date May 15, 2018
- Georgia Tech Research Corporation
- Farrokh Ayazi
- G01 - MEASURING TESTING
Information Patent Grant
Resonant gyroscopes and methods of making and using the same
- Patent number 9,917,571
- Issue date Mar 13, 2018
- Georgia Tech Research Corporation
- Farrokh Ayazi
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Method and apparatus for self-calibration of gyroscopes
- Patent number 9,915,532
- Issue date Mar 13, 2018
- Giorgio Casinovi
- G01 - MEASURING TESTING
Information Patent Grant
Mode-matched single proof-mass dual-axis gyroscope and method of fa...
- Patent number 9,726,489
- Issue date Aug 8, 2017
- Georgia Tech Research Corporation
- Farrokh Ayazi
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for self-calibration of gyroscopes
- Patent number 9,347,775
- Issue date May 24, 2016
- Georgia Tech Research Corporation
- Giorgio Casinovi
- G01 - MEASURING TESTING
Information Patent Grant
Microelectromechanical resonators having degenerately-doped and/or...
- Patent number 9,331,264
- Issue date May 3, 2016
- Georgia Tech Research Corporation
- Farrokh Ayazi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature compensation in a semiconductor micromechanical resonat...
- Patent number 9,319,020
- Issue date Apr 19, 2016
- Georgia Tech Research Corporation
- Farrokh Ayazi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Acoustically-engineered multi-port piezoelectric-on-semiconductor r...
- Patent number 9,318,998
- Issue date Apr 19, 2016
- Georgia Tech Research Corporation
- Roozbeh Tabrizian
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Bulk acoustic wave accelerometers
- Patent number 9,279,824
- Issue date Mar 8, 2016
- Georgia Tech Research Corporation
- Farrokh Ayazi
- G01 - MEASURING TESTING
Information Patent Grant
Self-polarized capacitive micromechanical resonator apparatus and f...
- Patent number 9,154,108
- Issue date Oct 6, 2015
- Farrokh Ayazi
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Vibratory tuning fork based six-degrees of freedom inertial measure...
- Patent number 9,003,882
- Issue date Apr 14, 2015
- Georgia Tech Research Corporation
- Farrokh Ayazi
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for self-calibration of gyroscopes
- Patent number 8,763,441
- Issue date Jul 1, 2014
- Georgia Tech Research Corporation
- Giorgio Casinovi
- G01 - MEASURING TESTING
Information Patent Grant
Readout method and electronic bandwidth control for a silicon in-pl...
- Patent number 8,677,821
- Issue date Mar 25, 2014
- Georgia Tech Research Coporation
- Farrokh Ayazi
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Microelectromechanical Systems (MEMS) Fabrication Process Including...
- Publication number 20240395540
- Publication date Nov 28, 2024
- StethX Microsystems
- Farrokh Ayazi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Acoustically Decoupled MEMS Devices
- Publication number 20240030887
- Publication date Jan 25, 2024
- Georgia Tech Research Corporation
- Farrokh Ayazi
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Membrane resonator array with backside exposure cavity for gas/chem...
- Publication number 20230408450
- Publication date Dec 21, 2023
- Georgia Tech Research Corporation
- Zhenming Liu
- G01 - MEASURING TESTING
Information Patent Application
Accelerometer Contact Microphones And Methods Thereof
- Publication number 20230276171
- Publication date Aug 31, 2023
- Georgia Tech Research Corporation
- Farrokh Ayazi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMB-DRIVEN SUBSTRATE DECOUPLED ANNULUS PITCH/ROLL BAW GYROSCOPE WI...
- Publication number 20210396518
- Publication date Dec 23, 2021
- Georgia Tech Research Corporation
- Haoran Wen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEMS AND METHODS HAVING MULTI-AXIS SENSITIVITY AND TRANSLATIONAL...
- Publication number 20210385586
- Publication date Dec 9, 2021
- Georgia Tech Research Corporation
- Pranav Gupta
- G01 - MEASURING TESTING
Information Patent Application
Integrated Atomic Beam Collimator and Methods Thereof
- Publication number 20210210247
- Publication date Jul 8, 2021
- Georgia Tech Research Corporation
- Chandra RAMAN
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
ACCELEROMETER CONTACT MICROPHONES AND METHODS THEREOF
- Publication number 20210127202
- Publication date Apr 29, 2021
- Georgia Tech Research Corporation
- Farrokh Ayazi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUBSTRATE-DECOUPLED HIGH-CORIOLIS-COUPLING PITCH/ROLL GYROSCOPE
- Publication number 20210063157
- Publication date Mar 4, 2021
- Georgia Tech Research Corporation
- Haoran Wen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACOUSTICALLY DECOUPLED MEMS DEVICES
- Publication number 20210028759
- Publication date Jan 28, 2021
- Georgia Tech Research Corporation
- Farrokh Ayazi
- G01 - MEASURING TESTING
Information Patent Application
MEMS INERTIAL MEASUREMENT APPARATUS HAVING SLANTED ELECTRODES FOR Q...
- Publication number 20200225036
- Publication date Jul 16, 2020
- Farrokh Ayazi
- G01 - MEASURING TESTING
Information Patent Application
MEMS INERTIAL MEASUREMENT APPARATUS HAVING SLANTED ELECTRODES FOR Q...
- Publication number 20200225037
- Publication date Jul 16, 2020
- Farrokh Ayazi
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM OF DUAL-MODE ACTUATION AND SENSING FOR REAL-TIME...
- Publication number 20190271718
- Publication date Sep 5, 2019
- Georgia Tech Research Corporation
- Arashk Norouz Pour Shirazi
- G01 - MEASURING TESTING
Information Patent Application
DISTRIBUTED-MODE BEAM AND FRAME RESONATORS FOR HIGH FREQUENCY TIMIN...
- Publication number 20190222196
- Publication date Jul 18, 2019
- Georgia Tech Research Corporation
- Anosh Daruwalla
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
PITCH/ROLL ANNULUS GYROSCOPE WITH SLANTED QUADRATURE TUNING ELECTRO...
- Publication number 20190137271
- Publication date May 9, 2019
- Georgia Tech Research Corporation
- Haoran Wen
- G01 - MEASURING TESTING
Information Patent Application
COMB-DRIVEN SUBSTRATE DECOUPLED ANNULUS PITCH/ROLL BAW GYROSCOPE WI...
- Publication number 20180321037
- Publication date Nov 8, 2018
- Georgia Tech Research Corporation
- Haoran Wen
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
SYSTEMS AND METHODS FOR STIFFNESS TRIMMING OF RESONATORS
- Publication number 20180222748
- Publication date Aug 9, 2018
- Georgia Tech Research Corporation
- Benoit Hamelin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS INERTIAL MEASUREMENT APPARATUS HAVING SLANTED ELECTRODES FOR Q...
- Publication number 20180216936
- Publication date Aug 2, 2018
- Farrokh Ayazi
- G01 - MEASURING TESTING
Information Patent Application
Systems and Methods for Operation of Vibratory Gyroscopes
- Publication number 20180209816
- Publication date Jul 26, 2018
- Georgia Tech Research Corporation
- Mojtaba Hodjat-Shamami
- G01 - MEASURING TESTING
Information Patent Application
RESONANT GYROSCOPES AND METHODS OF MAKING AND USING THE SAME
- Publication number 20170038211
- Publication date Feb 9, 2017
- Georgia Tech Research Corporation
- Farrokh Ayazi
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR SELF-CALIBRATION OF GYROSCOPES
- Publication number 20160370183
- Publication date Dec 22, 2016
- Georgia Tech Research Corporation
- Giorgio Casinovi
- G01 - MEASURING TESTING
Information Patent Application
MICRO-HEMISPHERICAL RESONATORS AND METHODS OF MAKING THE SAME
- Publication number 20160344368
- Publication date Nov 24, 2016
- Georgia Tech Research Corporation
- Farrokh Ayazi
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR DECOUPLING ENVIRONMENTAL AND MODAL DEPENDE...
- Publication number 20160327390
- Publication date Nov 10, 2016
- QUALTRE, INC.
- Diego E. Serrano
- G01 - MEASURING TESTING
Information Patent Application
BULK ACOUSTIC WAVE ACCELEROMETERS
- Publication number 20160258976
- Publication date Sep 8, 2016
- Georgia Tech Research Corporation
- Farrokh Ayazi
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM OF DUAL-MODE ACTUATION AND SENSING FOR REAL-TIME...
- Publication number 20160139176
- Publication date May 19, 2016
- Georgia Tech Research Corporation
- Arashk Norouz Pour Shirazi
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR SELF-CALIBRATION OF GYROSCOPES
- Publication number 20140157896
- Publication date Jun 12, 2014
- Giorgio Casinovi
- G01 - MEASURING TESTING
Information Patent Application
BULK ACOUSTIC WAVE ACCELEROMETERS
- Publication number 20140102197
- Publication date Apr 17, 2014
- Farrokh Ayazi
- G01 - MEASURING TESTING
Information Patent Application
MODE-MATCHED SINGLE PROOF-MASS DUAL-AXIS GYROSCOPE AND METHOD OF FA...
- Publication number 20130283911
- Publication date Oct 31, 2013
- Farrokh Ayazi
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR SELF-CALIBRATION OF GYROSCOPES
- Publication number 20130125614
- Publication date May 23, 2013
- Giorgio Casinovi
- G01 - MEASURING TESTING
Information Patent Application
SELF-POLARIZED CAPACITIVE MICROMECHANICAL RESONATOR APPARATUS AND F...
- Publication number 20130106533
- Publication date May 2, 2013
- Farrokh Ayazi
- H01 - BASIC ELECTRIC ELEMENTS

Farrokh Ayazi

Person

Patents Grantslast 30 patents

Acoustically decoupled MEMS devices

Accelerometer contact microphones and methods thereof

Substrate-decoupled high-coriolis-coupling pitch/roll gyroscope

Comb-driven substrate decoupled annulus pitch/roll BAW gyroscope wi...

Distributed-mode beam and frame resonators for high frequency timin...

MEMS inertial measurement apparatus having slanted electrodes for q...

MEMS inertial measurement apparatus having slanted electrodes for q...

Integrated atomic beam collimator and methods thereof

Comb-driven substrate decoupled annulus pitch/roll BAW gyroscope wi...

Method for frequency trimming a microelectromechanical resonator

Pitch/roll annulus gyroscope with slanted quadrature tuning electro...

Method and system of dual-mode actuation and sensing for real-time...

MEMS inertial measurement apparatus having slanted electrodes for q...

Systems and methods for operation of vibratory gyroscopes

Micro-hemispherical resonators and methods of making the same

Method and system of dual-mode actuation and sensing for real-time...

Bulk acoustic wave accelerometers

Bulk acoustic wave gyroscope with spoked structure

Resonant gyroscopes and methods of making and using the same

Method and apparatus for self-calibration of gyroscopes

Mode-matched single proof-mass dual-axis gyroscope and method of fa...

Method and apparatus for self-calibration of gyroscopes

Microelectromechanical resonators having degenerately-doped and/or...

Temperature compensation in a semiconductor micromechanical resonat...

Acoustically-engineered multi-port piezoelectric-on-semiconductor r...

Bulk acoustic wave accelerometers

Self-polarized capacitive micromechanical resonator apparatus and f...

Vibratory tuning fork based six-degrees of freedom inertial measure...

Method and apparatus for self-calibration of gyroscopes

Readout method and electronic bandwidth control for a silicon in-pl...

Patents Applicationslast 30 patents

Microelectromechanical Systems (MEMS) Fabrication Process Including...

Acoustically Decoupled MEMS Devices

Membrane resonator array with backside exposure cavity for gas/chem...

Accelerometer Contact Microphones And Methods Thereof

COMB-DRIVEN SUBSTRATE DECOUPLED ANNULUS PITCH/ROLL BAW GYROSCOPE WI...

SYSTEMS AND METHODS HAVING MULTI-AXIS SENSITIVITY AND TRANSLATIONAL...

Integrated Atomic Beam Collimator and Methods Thereof

ACCELEROMETER CONTACT MICROPHONES AND METHODS THEREOF

SUBSTRATE-DECOUPLED HIGH-CORIOLIS-COUPLING PITCH/ROLL GYROSCOPE

ACOUSTICALLY DECOUPLED MEMS DEVICES

MEMS INERTIAL MEASUREMENT APPARATUS HAVING SLANTED ELECTRODES FOR Q...

MEMS INERTIAL MEASUREMENT APPARATUS HAVING SLANTED ELECTRODES FOR Q...

METHOD AND SYSTEM OF DUAL-MODE ACTUATION AND SENSING FOR REAL-TIME...

DISTRIBUTED-MODE BEAM AND FRAME RESONATORS FOR HIGH FREQUENCY TIMIN...

PITCH/ROLL ANNULUS GYROSCOPE WITH SLANTED QUADRATURE TUNING ELECTRO...

COMB-DRIVEN SUBSTRATE DECOUPLED ANNULUS PITCH/ROLL BAW GYROSCOPE WI...

SYSTEMS AND METHODS FOR STIFFNESS TRIMMING OF RESONATORS

MEMS INERTIAL MEASUREMENT APPARATUS HAVING SLANTED ELECTRODES FOR Q...

Systems and Methods for Operation of Vibratory Gyroscopes

RESONANT GYROSCOPES AND METHODS OF MAKING AND USING THE SAME

METHOD AND APPARATUS FOR SELF-CALIBRATION OF GYROSCOPES

MICRO-HEMISPHERICAL RESONATORS AND METHODS OF MAKING THE SAME

METHOD AND APPARATUS FOR DECOUPLING ENVIRONMENTAL AND MODAL DEPENDE...

BULK ACOUSTIC WAVE ACCELEROMETERS

METHOD AND SYSTEM OF DUAL-MODE ACTUATION AND SENSING FOR REAL-TIME...

METHOD AND APPARATUS FOR SELF-CALIBRATION OF GYROSCOPES

BULK ACOUSTIC WAVE ACCELEROMETERS

MODE-MATCHED SINGLE PROOF-MASS DUAL-AXIS GYROSCOPE AND METHOD OF FA...

METHOD AND APPARATUS FOR SELF-CALIBRATION OF GYROSCOPES

SELF-POLARIZED CAPACITIVE MICROMECHANICAL RESONATOR APPARATUS AND F...