TREA

Fei Gwo Tsai

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  • Tainan, TW
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    METHOD OF FABRICATING RETICLE
    • Publication number 20210263425
    • Publication date Aug 26, 2021
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Hsueh-Yi CHUNG
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    DEVELOPING METHOD
    • Publication number 20200241421
    • Publication date Jul 30, 2020
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Yi-Rem CHEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF FABRICATING RETICLE
    • Publication number 20200150546
    • Publication date May 14, 2020
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Hsueh-Yi CHUNG
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    DEVELOPING METHOD
    • Publication number 20190049848
    • Publication date Feb 14, 2019
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Yi-Rem CHEN
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    SUBSTRATE SUPPORT APPARATUS AND METHOD
    • Publication number 20190027392
    • Publication date Jan 24, 2019
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Yueh Lin YANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF FABRICATING RETICLE
    • Publication number 20190004436
    • Publication date Jan 3, 2019
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Hsueh-Yi CHUNG
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    DEVELOPING METHOD
    • Publication number 20170343899
    • Publication date Nov 30, 2017
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Yi-Rem CHEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    EXPOSURE METHOD OF WAFER SUBSTRATE, MANUFACTURING METHOD OF SEMICON...
    • Publication number 20160124323
    • Publication date May 5, 2016
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Hsueh-Yi CHUNG
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SYSTEMS AND METHODS FOR EDGE BEAD REMOVAL
    • Publication number 20150298262
    • Publication date Oct 22, 2015
    • Taiwan Semiconductor Manufacturing Company Limited
    • CHUN-HAO CHANG
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Tool And Method Of Developing
    • Publication number 20150241786
    • Publication date Aug 27, 2015
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Yi-Rem Chen
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    DETECTION OF DEFECTS ON WAFER DURING SEMICONDUCTOR FABRICATION
    • Publication number 20140328534
    • Publication date Nov 6, 2014
    • Taiwan Semiconductor Manufacturing Company Limited
    • CHUN-HSIEN LIN
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Application

    Lithography System and Method For Mask Inspection
    • Publication number 20140226143
    • Publication date Aug 14, 2014
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Fei-Gwo Tsai
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    METHOD OF OPTIMIZING LITHOGRAPHY TOOLS UTILIZATION
    • Publication number 20140078478
    • Publication date Mar 20, 2014
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Yao-Hwan Kao
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD OF DETERMINING OVERLAY ERROR AND CONTROL SYSTEM FOR DYNAMIC...
    • Publication number 20130201462
    • Publication date Aug 8, 2013
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Yung-Yao LEE
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    DOUBLE PATTERNING METHOD USING TILT-ANGLE DEPOSITION
    • Publication number 20130023121
    • Publication date Jan 24, 2013
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chwen Yu
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    MULTI-NANOMETER-PROJECTION APPARATUS FOR LITHOGRAPHY, OXIDATION, IN...
    • Publication number 20120280333
    • Publication date Nov 8, 2012
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Fei-Gwo Tsai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Hybrid Multi-Layer Mask
    • Publication number 20110281208
    • Publication date Nov 17, 2011
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Feng-Lung Lin
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    MULTIPLE TECHNOLOGY NODE MASK
    • Publication number 20110113389
    • Publication date May 12, 2011
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Feng Lung Lin
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    HYBRID MULTI-LAYER MASK
    • Publication number 20100047698
    • Publication date Feb 25, 2010
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Feng-Lung Lin
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    MULTIPLE TECHNOLOGY NODE MASK
    • Publication number 20090246975
    • Publication date Oct 1, 2009
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Feng Lung Lin
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Method for Controlling Phase Angle of a Mask by Post-Treatment
    • Publication number 20080248404
    • Publication date Oct 9, 2008
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chun-Lang Chen
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    METHOD OF THE ADJUSTABLE MATCHING MAP SYSTEM IN LITHOGRAPHY
    • Publication number 20070099091
    • Publication date May 3, 2007
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Fei-Gwo Tsai
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    METHOD OF THE ADJUSTABLE MATCHING MAP SYSTEM IN LITHOGRAPHY
    • Publication number 20070099098
    • Publication date May 3, 2007
    • Taiwan Semiconductor Manufacturing Co., LTD
    • Fei-Gwo Tsai
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Composite layer method for minimizing PED effect
    • Publication number 20050244721
    • Publication date Nov 3, 2005
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Chun-Lang Chen
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Method of the adjustable matching map system in lithography
    • Publication number 20050118514
    • Publication date Jun 2, 2005
    • Taiwan Semiconductor Manufacturing Co.
    • Fei-Gwo Tsai
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Method of a floating pattern loading system in mask dry-etching cri...
    • Publication number 20050089765
    • Publication date Apr 28, 2005
    • Fei-Gwo Tsai
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Lithography apparatus and method employing non-environmental variab...
    • Publication number 20050037266
    • Publication date Feb 17, 2005
    • Fei Gwo Tsai
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Photomask transparent substrate protection during removal of opaque...
    • Publication number 20030228047
    • Publication date Dec 11, 2003
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Wei-Zen Chou
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    Photomask with dies relating to different functionalities
    • Publication number 20030224148
    • Publication date Dec 4, 2003
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Fei-Gwo Tsai
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY