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Fei Han
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San Jose, CA, US
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last 30 patents
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Patent Grant
Method of depositing dielectric materials including oxygen-doped si...
Patent number
7,151,053
Issue date
Dec 19, 2006
Applied Materials, Inc.
Ju-Hyung Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of depositing dielectric materials in damascene applications
Patent number
6,890,850
Issue date
May 10, 2005
Applied Materials, Inc.
Ju-Hyung Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Method of depositing dielectric materials in damascene applications
Publication number
20050233576
Publication date
Oct 20, 2005
Ju-Hyung Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of depositing dielectric materials in damascene applications
Publication number
20030129827
Publication date
Jul 10, 2003
APPLIED MATERIALS, INC.
Ju-Hyung Lee
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...