Fei-Yun Chen

Person

Hinchu, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Strained transistor with conductive plate
- Patent number 12,166,108
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chan-Yu Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process chamber and wafer processing method
- Patent number 10,741,366
- Issue date Aug 11, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chien Kuo Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Remote plasma system and method
- Patent number 10,011,532
- Issue date Jul 3, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fei-Fan Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas diffuser unit, process chamber and wafer processing method
- Patent number 10,008,367
- Issue date Jun 26, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chien Kuo Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transistor having a wing region
- Patent number 9,601,585
- Issue date Mar 21, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Liang Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for forming a semiconductor gate
- Patent number 9,466,681
- Issue date Oct 11, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Liang Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High voltage drain-extended MOSFET having extra drain-OD addition
- Patent number 9,299,806
- Issue date Mar 29, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Sheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transistor having an active region with wing structure
- Patent number 9,099,556
- Issue date Aug 4, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Liang Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for forming a semiconductor gate
- Patent number 9,070,663
- Issue date Jun 30, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Liang Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High voltage drain-extended MOSFET having extra drain-OD addition
- Patent number 9,035,380
- Issue date May 19, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Sheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Remote plasma system and method
- Patent number 8,944,003
- Issue date Feb 3, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fei-Fan Chen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma density control
- Patent number 8,889,435
- Issue date Nov 18, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Sheng Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Concave and convex micromirrors and methods of making the same
- Patent number 8,691,100
- Issue date Apr 8, 2014
- Taiwan Semiconductor Manufacturing Co. Ltd.
- Dah-Chuen Ho
- G02 - OPTICS
Information Patent Grant
Power transistor with high voltage counter implant
- Patent number 8,673,712
- Issue date Mar 18, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Kuang Hsiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for forming a semiconductor gate
- Patent number 8,513,712
- Issue date Aug 20, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Liang Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alternating-doping profile for source/drain of a FET
- Patent number 8,377,787
- Issue date Feb 19, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Liang Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-voltage MOS devices having gates extending into recesses of su...
- Patent number 8,183,626
- Issue date May 22, 2012
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Liang Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alternating-doping profile for source/drain of a FET
- Patent number 7,977,743
- Issue date Jul 12, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Liang Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-voltage MOS devices having gates extending into recesses of su...
- Patent number 7,888,734
- Issue date Feb 15, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Liang Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device with robust polysilicon fuse
- Patent number 7,576,374
- Issue date Aug 18, 2009
- Taiwan Semiconductor Manufacturing Company
- Yuan-Pang Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to avoid amorphous-si damage during wet stripping processes...
- Patent number 7,384,799
- Issue date Jun 10, 2008
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Fei-Yun Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for releasing a micromechanical structure
- Patent number 7,294,279
- Issue date Nov 13, 2007
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Fei-Yun Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Surface MEMS mirrors with oxide spacers
- Patent number 7,205,176
- Issue date Apr 17, 2007
- Taiwan Semiconductor Manufacturing Company
- Fei-Yuh Chen
- G02 - OPTICS
Information Patent Grant
Method for polymer residue removal following metal etching
- Patent number 7,192,489
- Issue date Mar 20, 2007
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chi-Hsin Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spacer fabrication process for manufacturing reflective stealth mir...
- Patent number 7,180,651
- Issue date Feb 20, 2007
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shan-Hua Wu
- G02 - OPTICS
Information Patent Grant
Backside coating for MEMS wafer
- Patent number 7,153,768
- Issue date Dec 26, 2006
- Taiwan Semiconductor Manufacturing Co.
- Fei-Yuh Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Effective photoresist stripping process for high dosage and high en...
- Patent number 7,144,673
- Issue date Dec 5, 2006
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Fei-Yun Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of fabricating a poly fuse
- Patent number 7,083,897
- Issue date Aug 1, 2006
- Taiwan Semiconductor Manufacturing Company
- Yuan-Pang Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Micromirror for MEMS device
- Patent number 7,057,794
- Issue date Jun 6, 2006
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shen-Ping Wang
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
HIGH VOLTAGE TRANSISTOR STRUCTURE AND METHODS OF FORMATION
- Publication number 20250006731
- Publication date Jan 2, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kau-Chu LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSISTOR DEVICE HAVING A GATE SETBACK FROM A GATE DIELECTRIC
- Publication number 20240258373
- Publication date Aug 1, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ta-Yuan Kung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITE GATE DIELECTRIC FOR HIGH-VOLTAGE DEVICE
- Publication number 20240113187
- Publication date Apr 4, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jhu-Min Song
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCHOTTKY DIODE AND METHOD FOR FORMING THE SAME
- Publication number 20240097051
- Publication date Mar 21, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- GUAN-YI LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID FIN-DIELECTRIC SEMICONDUCTOR DEVICE
- Publication number 20240071833
- Publication date Feb 29, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Huan Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240047542
- Publication date Feb 8, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- JHIH-BIN CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240030292
- Publication date Jan 25, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- CHIA-CHENG HO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Strained Transistor with Conductive Plate
- Publication number 20230378324
- Publication date Nov 23, 2023
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Chan-Yu Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PROCESSING METHOD
- Publication number 20200357612
- Publication date Nov 12, 2020
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien Kuo HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS CHAMBER AND WAFER PROCESSING METHOD
- Publication number 20180308665
- Publication date Oct 25, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien Kuo HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRANSISTOR HAVING A WING REGION
- Publication number 20150295055
- Publication date Oct 15, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Liang CHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR FORMING A SEMICONDUCTOR GATE
- Publication number 20150279951
- Publication date Oct 1, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Liang Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Voltage Drain-Extended MOSFET Having Extra Drain-OD Addition
- Publication number 20150249144
- Publication date Sep 3, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Sheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Remote Plasma System and Method
- Publication number 20150155185
- Publication date Jun 4, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fei-Fan Chen
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
GAS DIFFUSER UNIT, PROCESS CHAMBER AND WAFER PROCESSING METHOD
- Publication number 20150002017
- Publication date Jan 1, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien Kuo HUANG
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
High Voltage Drain-Extended MOSFET Having Extra Drain-OD Addition
- Publication number 20140145261
- Publication date May 29, 2014
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
- Yi-Sheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Remote Plasma System and Method
- Publication number 20140141614
- Publication date May 22, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fei-Fan Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Power Transistor with High Voltage Counter Implant
- Publication number 20140021539
- Publication date Jan 23, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Kuang Hsiao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Forming a Semiconductor Gate
- Publication number 20130337644
- Publication date Dec 19, 2013
- Chen-Liang Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Density Control
- Publication number 20130084657
- Publication date Apr 4, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Sheng Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSISTOR HAVING WING STRUCTURE
- Publication number 20130043533
- Publication date Feb 21, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Liang CHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALTERNATING-DOPING PROFILE FOR SOURCE/DRAIN OF A FET
- Publication number 20110237041
- Publication date Sep 29, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Liang Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High-Voltage MOS Devices Having Gates Extending into Recesses of Su...
- Publication number 20110163375
- Publication date Jul 7, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Liang Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR FORMING A SEMICONDUCTOR GATE
- Publication number 20110073962
- Publication date Mar 31, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Liang Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALTERNATING-DOPING PROFILE FOR SOURCE/DRAIN OF A FET
- Publication number 20100213542
- Publication date Aug 26, 2010
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Liang Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High-Voltage MOS Devices Having Gates Extending into Recesses of Su...
- Publication number 20100140687
- Publication date Jun 10, 2010
- Chen-Liang Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACTIVE DEVICE ARRAY SUBSTRATE AND METHOD FOR DRIVING THE SAME
- Publication number 20090153530
- Publication date Jun 18, 2009
- AU OPTRONICS CORPORATION
- Fei-Shun Chen
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Application
Concave and convex micromirrors and methods of making the same
- Publication number 20070285760
- Publication date Dec 13, 2007
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Dah-Chuen Ho
- G02 - OPTICS
Information Patent Application
SEMICONDUCTOR DEVICE WITH ROBUST POLYSILICON FUSE
- Publication number 20060240363
- Publication date Oct 26, 2006
- Yuan-Pang Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for releasing a micromechanical structure
- Publication number 20060207964
- Publication date Sep 21, 2006
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Fei-Yun Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Fei-Yun Chen

Person

Patents Grantslast 30 patents

Strained transistor with conductive plate

Process chamber and wafer processing method

Remote plasma system and method

Gas diffuser unit, process chamber and wafer processing method

Transistor having a wing region

Method and apparatus for forming a semiconductor gate

High voltage drain-extended MOSFET having extra drain-OD addition

Transistor having an active region with wing structure

Method and apparatus for forming a semiconductor gate

High voltage drain-extended MOSFET having extra drain-OD addition

Remote plasma system and method

Plasma density control

Concave and convex micromirrors and methods of making the same

Power transistor with high voltage counter implant

Method and apparatus for forming a semiconductor gate

Alternating-doping profile for source/drain of a FET

High-voltage MOS devices having gates extending into recesses of su...

Alternating-doping profile for source/drain of a FET

High-voltage MOS devices having gates extending into recesses of su...

Semiconductor device with robust polysilicon fuse

Method to avoid amorphous-si damage during wet stripping processes...

Method for releasing a micromechanical structure

Surface MEMS mirrors with oxide spacers

Method for polymer residue removal following metal etching

Spacer fabrication process for manufacturing reflective stealth mir...

Backside coating for MEMS wafer

Effective photoresist stripping process for high dosage and high en...

Method of fabricating a poly fuse

Micromirror for MEMS device

Patents Applicationslast 30 patents

HIGH VOLTAGE TRANSISTOR STRUCTURE AND METHODS OF FORMATION

TRANSISTOR DEVICE HAVING A GATE SETBACK FROM A GATE DIELECTRIC

COMPOSITE GATE DIELECTRIC FOR HIGH-VOLTAGE DEVICE

SCHOTTKY DIODE AND METHOD FOR FORMING THE SAME

HYBRID FIN-DIELECTRIC SEMICONDUCTOR DEVICE

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURING THE SAME

Strained Transistor with Conductive Plate

WAFER PROCESSING METHOD

PROCESS CHAMBER AND WAFER PROCESSING METHOD

TRANSISTOR HAVING A WING REGION

METHOD AND APPARATUS FOR FORMING A SEMICONDUCTOR GATE

High Voltage Drain-Extended MOSFET Having Extra Drain-OD Addition

Remote Plasma System and Method

GAS DIFFUSER UNIT, PROCESS CHAMBER AND WAFER PROCESSING METHOD

High Voltage Drain-Extended MOSFET Having Extra Drain-OD Addition

Remote Plasma System and Method

Power Transistor with High Voltage Counter Implant

Method and Apparatus for Forming a Semiconductor Gate

Plasma Density Control

TRANSISTOR HAVING WING STRUCTURE

ALTERNATING-DOPING PROFILE FOR SOURCE/DRAIN OF A FET

High-Voltage MOS Devices Having Gates Extending into Recesses of Su...

METHOD AND APPARATUS FOR FORMING A SEMICONDUCTOR GATE

ALTERNATING-DOPING PROFILE FOR SOURCE/DRAIN OF A FET

High-Voltage MOS Devices Having Gates Extending into Recesses of Su...

ACTIVE DEVICE ARRAY SUBSTRATE AND METHOD FOR DRIVING THE SAME

Concave and convex micromirrors and methods of making the same

SEMICONDUCTOR DEVICE WITH ROBUST POLYSILICON FUSE

Method for releasing a micromechanical structure