Feihong LIAO

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Shanghai, CN

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Patents Grantslast 30 patents

Information Patent Grant
Photolithography tool and method for compensating for surface defor...
- Patent number 10,345,720
- Issue date Jul 9, 2019
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Yinlei Wei
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography machine workpiece table and vertical position initializ...
- Patent number 9,760,022
- Issue date Sep 12, 2017
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Feihong Liao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PHOTOLITHOGRAPHY TOOL AND METHOD FOR COMPENSATING FOR SURFACE DEFOR...
- Publication number 20180246412
- Publication date Aug 30, 2018
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Yinlei WEI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY MACHINE WORKPIECE TABLE AND VERTICAL POSITION INITIALIZ...
- Publication number 20170017168
- Publication date Jan 19, 2017
- SHANGHAI MICRO ELECTRONICS EQUIPMENT Co., LTD.
- Feihong LIAO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY