Feihu Wang

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods for low resistivity and stress tungsten gap fill
- Patent number 12,094,773
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Xi Cen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for low resistivity and stress tungsten gap fill
- Patent number 11,798,845
- Issue date Oct 24, 2023
- Applied Materials, Inc.
- Xi Cen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20220403505
- Publication date Dec 22, 2022
- Annamalai LAKSHMANAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR LOW RESISTIVITY AND STRESS TUNGSTEN GAP FILL
- Publication number 20220336274
- Publication date Oct 20, 2022
- Applied Materials, Inc.
- Xi CEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Low Resistivity DRAM Buried Word Line Stack
- Publication number 20220278108
- Publication date Sep 1, 2022
- Applied Materials, Inc.
- Yixiong Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Low Resistivity Metal Contact Stack
- Publication number 20220277961
- Publication date Sep 1, 2022
- Applied Materials, Inc.
- Annamalai Lakshmanan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR LOW RESISTIVITY AND STRESS TUNGSTEN GAP FILL
- Publication number 20220130724
- Publication date Apr 28, 2022
- Applied Materials, Inc.
- Xi CEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Low Resistivity Tungsten Film And Method Of Manufacture
- Publication number 20220068709
- Publication date Mar 3, 2022
- Applied Materials, Inc.
- Feihu Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Selector Elements
- Publication number 20170104031
- Publication date Apr 13, 2017
- Intermolecular, Inc.
- Mark Clark
- G11 - INFORMATION STORAGE

Person

Patents Grantslast 30 patents

Methods for low resistivity and stress tungsten gap fill

Methods and apparatus for low resistivity and stress tungsten gap fill

Patents Applicationslast 30 patents

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

METHODS FOR LOW RESISTIVITY AND STRESS TUNGSTEN GAP FILL

Low Resistivity DRAM Buried Word Line Stack

Low Resistivity Metal Contact Stack

METHODS AND APPARATUS FOR LOW RESISTIVITY AND STRESS TUNGSTEN GAP FILL

Low Resistivity Tungsten Film And Method Of Manufacture

Selector Elements