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Feijue Liu
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Shanghai, CN
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last 30 patents
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Patent Grant
Method of detecting and measuring contact alignment shift relative...
Patent number
9,269,639
Issue date
Feb 23, 2016
Shanghai Huali Microelectronics Corporation
Rongwei Fan
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
METHOD OF DETECTING AND MEASURING CONTACT ALIGNMENT SHIFT RELATIVE...
Publication number
20140377888
Publication date
Dec 25, 2014
Rongwei Fan
H01 - BASIC ELECTRIC ELEMENTS