Feiyun Yang

Follow

Person

Shanghai City, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 9,271,384
- Issue date Feb 23, 2016
- IDEAL ENERGY (SHANGHAI) SUNFLOWER THIN FILM EQUIPMENT, LTD.
- Jinyuan Chen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Plasma Processing Apparatus
- Publication number 20130249399
- Publication date Sep 26, 2013
- Jinyuan Chen
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING