Felix LANGE

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Giengen an der Brenz, DE

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Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR DEPOSITION OF AT LEAST ONE LAYER, OPTICAL...
- Publication number 20240035163
- Publication date Feb 1, 2024
- Carl Zeiss SMT GMBH
- Felix LANGE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OPTICAL ELEMENT FOR THE VUV WAVELENGTH RANGE, OPTICAL ARRANGEMENT,...
- Publication number 20230147463
- Publication date May 11, 2023
- Carl Zeiss SMT GMBH
- Felix LANGE
- G02 - OPTICS