Felix Rabinovich

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Campbell, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for gas delivery in semiconductor process cham...
- Patent number 11,380,557
- Issue date Jul 5, 2022
- Applied Materials, Inc.
- Vincent Kirchhoff
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for cleaning chamber components
- Patent number 7,789,969
- Issue date Sep 7, 2010
- Applied Materials, Inc.
- Felix Rabinovich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SHAFT MEMBERS, PROCESS KITS AND SEMICONDUCTOR PROCESSING SYSTEMS HA...
- Publication number 20240222187
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Aniket Chitale
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CASTABLE ALUMINUM ALLOYS FOR WAFER HANDLING CHAMBERS IN SEMICONDUCT...
- Publication number 20230235428
- Publication date Jul 27, 2023
- ASM IP HOLDING B.V.
- Joaquin Aguilar Santillan
- B22 - CASTING POWDER METALLURGY
Information Patent Application
APPARATUS AND METHOD FOR GAS DELIVERY IN SEMICONDUCTOR PROCESS CHAM...
- Publication number 20180350627
- Publication date Dec 6, 2018
- Applied Materials, Inc.
- Vincent Kirchhoff
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
METHODS FOR FABRICATING FACEPLATE OF SEMICONDUCTOR APPARATUS
- Publication number 20100071210
- Publication date Mar 25, 2010
- Applied Materials, Inc.
- TIEN FAK TAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CLEANING CHAMBER COMPONENTS
- Publication number 20080099054
- Publication date May 1, 2008
- FELIX RABINOVICH
- B08 - CLEANING