Feng BI

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Cupertino, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Showerhead with air-gapped plenums and overhead isolation gas distr...
- Patent number 10,745,806
- Issue date Aug 18, 2020
- Lam Research Corporation
- Nagraj Shankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning process for removing boron-carbon residuals in processing...
- Patent number 10,679,830
- Issue date Jun 9, 2020
- Applied Materials, Inc.
- Feng Bi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead with air-gapped plenums and overhead isolation gas distr...
- Patent number 10,472,716
- Issue date Nov 12, 2019
- Lam Research Corporation
- Nagraj Shankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
HIGH TEMPERATURE PEDESTAL WITH EXTENDED ELECTROSTATIC CHUCK ELECTRODE
- Publication number 20230369091
- Publication date Nov 16, 2023
- LAM RESEARCH CORPORATION
- Feng BI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD WITH AIR-GAPPED PLENUMS AND OVERHEAD ISOLATION GAS DISTR...
- Publication number 20200063261
- Publication date Feb 27, 2020
- LAM RESEARCH CORPORATION
- Nagraj Shankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD WITH AIR-GAPPED PLENUMS AND OVERHEAD ISOLATION GAS DISTR...
- Publication number 20190352777
- Publication date Nov 21, 2019
- LAM RESEARCH CORPORATION
- Nagraj Shankar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING PROCESS FOR REMOVING BORON-CARBON RESIDUALS IN PROCESSING...
- Publication number 20170365450
- Publication date Dec 21, 2017
- Applied Materials, Inc.
- Feng BI
- B08 - CLEANING
Information Patent Application
UNIFORM WAFER TEMPERATURE ACHIEVEMENT IN UNSYMMETRIC CHAMBER ENVIRO...
- Publication number 20170178758
- Publication date Jun 22, 2017
- Applied Materials, Inc.
- Sungwon HA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...