Feng-Chi Chung

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Hsinchu County, TW

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Patents Grantslast 30 patents

Information Patent Grant
Virtual metrology system and method
- Patent number 10,935,969
- Issue date Mar 2, 2021
- United Microelectronics Corp.
- Feng-Chi Chung
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of monitoring processing system for processing substrate
- Patent number 10,606,253
- Issue date Mar 31, 2020
- United Microelectronics Corp.
- Lian-Hua Shih
- G05 - CONTROLLING REGULATING
Information Patent Grant
Virtual metrology system and method
- Patent number 10,261,504
- Issue date Apr 16, 2019
- United Microelectronics Corp.
- Feng-Chi Chung
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
VIRTUAL METROLOGY SYSTEM AND METHOD
- Publication number 20190187674
- Publication date Jun 20, 2019
- United Microelectronics Corp.
- Feng-Chi Chung
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF MONITORING PROCESSING SYSTEM FOR PROCESSING SUBSTRATE
- Publication number 20180224817
- Publication date Aug 9, 2018
- United Microelectronics Corp.
- Lian-Hua Shih
- G05 - CONTROLLING REGULATING
Information Patent Application
Method of virtual metrology using combined models
- Publication number 20160274570
- Publication date Sep 22, 2016
- UNITED MICROELECTRONICS CORP.
- Lian-Hua Shih
- G05 - CONTROLLING REGULATING
Information Patent Application
VIRTUAL METROLOGY SYSTEM AND METHOD
- Publication number 20160041548
- Publication date Feb 11, 2016
- United Microelectronics Corp.
- Feng-Chi Chung
- G05 - CONTROLLING REGULATING
Information Patent Application
Method of fault detection and classification (FDC) for improved too...
- Publication number 20160031056
- Publication date Feb 4, 2016
- UNITED MICROELECTRONICS CORP.
- Feng-Chi Chung
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR