Feng-Chi WU

Person

Hsinchu, TW

People

Patents Grantslast 30 patents

Information Patent Grant
CMP safe alignment mark
- Patent number 12,255,150
- Issue date Mar 18, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Huang-Jen Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for handling semiconductor part carriers
- Patent number 12,165,906
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ren-Hau Wu
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Systems and methods for raised floor automated sensor vehicles
- Patent number 12,153,433
- Issue date Nov 26, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Cheng-Kang Hu
- G05 - CONTROLLING REGULATING
Information Patent Grant
Polishing head, chemical-mechanical polishing system and method for...
- Patent number 12,128,522
- Issue date Oct 29, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shu-Bin Hsu
- B24 - GRINDING POLISHING
Information Patent Grant
Arcing protection method, processing tool and fabrication system
- Patent number 12,057,301
- Issue date Aug 6, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Wun-Kai Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Robot gripper for moving wafer carriers and packing materials and m...
- Patent number 12,017,342
- Issue date Jun 25, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chien-Fa Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Robot gripper for moving wafer carriers and packing materials and m...
- Patent number 11,685,055
- Issue date Jun 27, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chien-Fa Lee
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Arcing protection method and processing tool
- Patent number 11,664,206
- Issue date May 30, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wun-Kai Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Under-floor charging station
- Patent number 11,437,843
- Issue date Sep 6, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Cheng-Lung Wu
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Polishing head, chemical-mechanical polishing system and method for...
- Patent number 11,407,083
- Issue date Aug 9, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shu-Bin Hsu
- B24 - GRINDING POLISHING
Information Patent Grant
Systems and methods for raised floor automated sensor vehicles
- Patent number 11,334,080
- Issue date May 17, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Cheng-Kang Hu
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Device positioning using sensors
- Patent number 10,971,386
- Issue date Apr 6, 2021
- Taiwan Semiconductor Manufacturing Company Limited
- Yan-Han Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Techniques for detecting micro-arcing occurring inside a semiconduc...
- Patent number 10,734,206
- Issue date Aug 4, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Feng-Kuang Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for detecting micro-arcing occurring inside a semiconduc...
- Patent number 10,559,453
- Issue date Feb 11, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Feng-Kuang Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing head, chemical-mechanical polishing system and method for...
- Patent number 10,328,549
- Issue date Jun 25, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shu-Bin Hsu
- B24 - GRINDING POLISHING
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 10,276,395
- Issue date Apr 30, 2019
- United Microelectronics Corp.
- Chien-Hao Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for detecting micro-arcing occurring inside a semiconduc...
- Patent number 10,170,287
- Issue date Jan 1, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Feng-Kuang Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of CMP pad conditioning
- Patent number 9,908,213
- Issue date Mar 6, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiu-Ming Yeh
- B24 - GRINDING POLISHING
Information Patent Grant
Semiconductor manufacturing apparatus and method thereof
- Patent number 9,768,080
- Issue date Sep 19, 2017
- Taiwan Semiconductor Manufacturing Company Ltd.
- Jia-Jhen Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Display device and method for manufacturing the same
- Patent number 9,488,865
- Issue date Nov 8, 2016
- AU OPTRONICS CORPORATION
- Feng-Chi Wu
- G02 - OPTICS
Information Patent Grant
Chemical mechanical polishing apparatus and polishing method using...
- Patent number 9,481,069
- Issue date Nov 1, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yuan-Hsuan Chen
- B24 - GRINDING POLISHING
Information Patent Grant
Localized CMP to improve wafer planarization
- Patent number 9,418,904
- Issue date Aug 16, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Sheng-Chen Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for CMP pad conditioning
- Patent number 9,149,906
- Issue date Oct 6, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiu-Ming Yeh
- B24 - GRINDING POLISHING
Information Patent Grant
Slurry supply system for CMP process
- Patent number 8,992,287
- Issue date Mar 31, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Sheng-Chen Wang
- B24 - GRINDING POLISHING
Information Patent Grant
Systems providing an air zone for a chucking stage
- Patent number 8,939,815
- Issue date Jan 27, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hui-Ting Tsai
- B24 - GRINDING POLISHING
Information Patent Grant
Packet processing system for a network packet forwarding device and...
- Patent number 8,526,432
- Issue date Sep 3, 2013
- Ralink Technology Corp.
- Feng-Chi Wu
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Photocurable pigment type inkjet ink composition
- Patent number 7,591,890
- Issue date Sep 22, 2009
- Industrial Technology Research Institute
- Chi-Jung Chang
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Removal of wafer edge defocus due to CMP
- Patent number 6,664,189
- Issue date Dec 16, 2003
- Taiwan Semiconductor Manufacturing Company
- Kuang-Hung Lin
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LONG-DISTANCE WI-FI COMMUNICATION METHOD AND APPARATUS THEREOF
- Publication number 20250193800
- Publication date Jun 12, 2025
- MEDIATEK INC.
- Feng-Chi WU
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
APPARATUS AND METHODS FOR HANDLING SEMICONDUCTOR PART CARRIERS
- Publication number 20250096030
- Publication date Mar 20, 2025
- Taiwan Semiconductor Manufacturing Co., LTD
- Ren-Hau WU
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
CMP SAFE ALIGNMENT MARK
- Publication number 20240387398
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Huang-Jen HSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR RAISED FLOOR AUTOMATED SENSOR VEHICLES
- Publication number 20240377826
- Publication date Nov 14, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Cheng-Kang HU
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
ARCING PROTECTION METHOD, PROCESSING TOOL AND FABRICATION SYSTEM
- Publication number 20240363318
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wun-Kai TSAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROBOT GRIPPER FOR MOVING WAFER CARRIERS AND PACKING MATERIALS AND M...
- Publication number 20240308085
- Publication date Sep 19, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- CHIEN-FA LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROBOT GRIPPER FOR MOVING WAFER CARRIERS AND PACKING MATERIALS AND M...
- Publication number 20230278231
- Publication date Sep 7, 2023
- Taiwan Semiconductor Manufacturing company Ltd.
- CHIEN-FA LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARCING PROTECTION METHOD, PROCESSING TOOL AND FABRICATION SYSTEM
- Publication number 20230253195
- Publication date Aug 10, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wun-Kai TSAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INKJET INK, 3D PRINTING METHOD, AND 3D PRINTING OBJECT
- Publication number 20220363944
- Publication date Nov 17, 2022
- Industrial Technology Research Institute
- Yi-Tsung PAN
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
UNDER-FLOOR CHARGING STATION
- Publication number 20220368151
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Cheng-Lung WU
- B60 - VEHICLES IN GENERAL
Information Patent Application
POLISHING HEAD, CHEMICAL-MECHANICAL POLISHING SYSTEM AND METHOD FOR...
- Publication number 20220355437
- Publication date Nov 10, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shu-Bin HSU
- B24 - GRINDING POLISHING
Information Patent Application
SYSTEMS AND METHODS FOR RAISED FLOOR AUTOMATED SENSOR VEHICLES
- Publication number 20220261001
- Publication date Aug 18, 2022
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Cheng-Kang HU
- G01 - MEASURING TESTING
Information Patent Application
CMP SAFE ALIGNMENT MARK
- Publication number 20220102285
- Publication date Mar 31, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Huang-Jen HSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR...
- Publication number 20210407819
- Publication date Dec 30, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Chen Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UNDER-FLOOR CHARGING STATION
- Publication number 20210376649
- Publication date Dec 2, 2021
- Taiwan Semiconductor Manufacturing Company Limited
- Cheng-Lung WU
- B60 - VEHICLES IN GENERAL
Information Patent Application
ROBOT GRIPPER FOR MOVING WAFER CARRIERS AND PACKING MATERIALS AND M...
- Publication number 20210331327
- Publication date Oct 28, 2021
- Taiwan Semiconductor Manufacturing company Ltd.
- CHIEN-FA LEE
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
DEVICE POSITIONING USING SENSORS
- Publication number 20210082718
- Publication date Mar 18, 2021
- Taiwan Semiconductor Manufacturing Company Limited
- Yan-Han CHEN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF 3D-PRINTING AND COMPOSITE MATERIAL
- Publication number 20200384687
- Publication date Dec 10, 2020
- Industrial Technology Research Institute
- Yi-Tsung PAN
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Application
APPARATUS AND METHODS FOR HANDLING SEMICONDUCTOR PART CARRIERS
- Publication number 20200161161
- Publication date May 21, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Ren-Hau WU
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
TECHNIQUES FOR DETECTING MICRO-ARCING OCCURRING INSIDE A SEMICONDUC...
- Publication number 20200111652
- Publication date Apr 9, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Feng-Kuang Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING HEAD, CHEMICAL-MECHANICAL POLISHING SYSTEM AND METHOD FOR...
- Publication number 20190308295
- Publication date Oct 10, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shu-Bin HSU
- B24 - GRINDING POLISHING
Information Patent Application
ARCING PROTECTION METHOD AND PROCESSING TOOL
- Publication number 20190139746
- Publication date May 9, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wun-Kai TSAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES FOR DETECTING MICRO-ARCING OCCURRING INSIDE A SEMICONDUC...
- Publication number 20190131116
- Publication date May 2, 2019
- Taiwan Semiconductor Manufacturing Co., LTD
- Feng-Kuang Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISPERSION OF IR ABSORPTION PARTICLES, INKJET INK, AND METHOD OF 3D...
- Publication number 20190127599
- Publication date May 2, 2019
- Industrial Technology Research Institute
- Jer-Young CHEN
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20180286692
- Publication date Oct 4, 2018
- UNITED MICROELECTRONICS CORP.
- Chien-Hao Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DISPLAY DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20160062184
- Publication date Mar 3, 2016
- AU OPTRONICS CORPORATION
- Feng-Chi WU
- G02 - OPTICS
Information Patent Application
METHOD OF AND APPARATUS FOR CMP PAD CONDITIONING
- Publication number 20160023324
- Publication date Jan 28, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsiu-Ming Yeh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD THEREOF
- Publication number 20150170978
- Publication date Jun 18, 2015
- Taiwan Semiconductor Manufacturing company Ltd.
- JIA-JHEN CHEN
- G01 - MEASURING TESTING
Information Patent Application
POLISHING HEAD, CHEMICAL-MECHANICAL POLISHING SYSTEM AND METHOD FOR...
- Publication number 20150158140
- Publication date Jun 11, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shu-Bin HSU
- B24 - GRINDING POLISHING
Information Patent Application
CHEMICAL MECHANICAL POLISHING APPARATUS AND POLISHING METHOD USING...
- Publication number 20150126095
- Publication date May 7, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yuan-Hsuan CHEN
- B24 - GRINDING POLISHING

Feng-Chi WU

Person

Patents Grantslast 30 patents

CMP safe alignment mark

Apparatus and methods for handling semiconductor part carriers

Systems and methods for raised floor automated sensor vehicles

Polishing head, chemical-mechanical polishing system and method for...

Arcing protection method, processing tool and fabrication system

Robot gripper for moving wafer carriers and packing materials and m...

Robot gripper for moving wafer carriers and packing materials and m...

Arcing protection method and processing tool

Under-floor charging station

Polishing head, chemical-mechanical polishing system and method for...

Systems and methods for raised floor automated sensor vehicles

Device positioning using sensors

Techniques for detecting micro-arcing occurring inside a semiconduc...

Techniques for detecting micro-arcing occurring inside a semiconduc...

Polishing head, chemical-mechanical polishing system and method for...

Method for manufacturing semiconductor device

Techniques for detecting micro-arcing occurring inside a semiconduc...

Method of CMP pad conditioning

Semiconductor manufacturing apparatus and method thereof

Display device and method for manufacturing the same

Chemical mechanical polishing apparatus and polishing method using...

Localized CMP to improve wafer planarization

Apparatus for CMP pad conditioning

Slurry supply system for CMP process

Systems providing an air zone for a chucking stage

Packet processing system for a network packet forwarding device and...

Photocurable pigment type inkjet ink composition

Removal of wafer edge defocus due to CMP

Patents Applicationslast 30 patents

LONG-DISTANCE WI-FI COMMUNICATION METHOD AND APPARATUS THEREOF

APPARATUS AND METHODS FOR HANDLING SEMICONDUCTOR PART CARRIERS

CMP SAFE ALIGNMENT MARK

SYSTEMS AND METHODS FOR RAISED FLOOR AUTOMATED SENSOR VEHICLES

ARCING PROTECTION METHOD, PROCESSING TOOL AND FABRICATION SYSTEM

ROBOT GRIPPER FOR MOVING WAFER CARRIERS AND PACKING MATERIALS AND M...

ROBOT GRIPPER FOR MOVING WAFER CARRIERS AND PACKING MATERIALS AND M...

ARCING PROTECTION METHOD, PROCESSING TOOL AND FABRICATION SYSTEM

INKJET INK, 3D PRINTING METHOD, AND 3D PRINTING OBJECT

UNDER-FLOOR CHARGING STATION

POLISHING HEAD, CHEMICAL-MECHANICAL POLISHING SYSTEM AND METHOD FOR...

SYSTEMS AND METHODS FOR RAISED FLOOR AUTOMATED SENSOR VEHICLES

CMP SAFE ALIGNMENT MARK

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND A SEMICONDUCTOR...

UNDER-FLOOR CHARGING STATION

ROBOT GRIPPER FOR MOVING WAFER CARRIERS AND PACKING MATERIALS AND M...

DEVICE POSITIONING USING SENSORS

METHOD OF 3D-PRINTING AND COMPOSITE MATERIAL

APPARATUS AND METHODS FOR HANDLING SEMICONDUCTOR PART CARRIERS

TECHNIQUES FOR DETECTING MICRO-ARCING OCCURRING INSIDE A SEMICONDUC...

POLISHING HEAD, CHEMICAL-MECHANICAL POLISHING SYSTEM AND METHOD FOR...

ARCING PROTECTION METHOD AND PROCESSING TOOL

TECHNIQUES FOR DETECTING MICRO-ARCING OCCURRING INSIDE A SEMICONDUC...

DISPERSION OF IR ABSORPTION PARTICLES, INKJET INK, AND METHOD OF 3D...

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

DISPLAY DEVICE AND METHOD FOR MANUFACTURING THE SAME

METHOD OF AND APPARATUS FOR CMP PAD CONDITIONING

SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD THEREOF

POLISHING HEAD, CHEMICAL-MECHANICAL POLISHING SYSTEM AND METHOD FOR...

CHEMICAL MECHANICAL POLISHING APPARATUS AND POLISHING METHOD USING...