Feng LV

Person

  • Beijing, CN

Patents Grantslast 30 patents

  • Information Patent Grant

    Magnetron and magnetron sputtering device

    • Patent number 10,381,202
    • Issue date Aug 13, 2019
    • BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
    • Yujie Yang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Process chamber and semiconductor processing apparatus

    • Patent number 10,347,470
    • Issue date Jul 9, 2019
    • BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
    • Feng Lv
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents