Feng Wang

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck with ceramic monolithic body
- Patent number 11,967,517
- Issue date Apr 23, 2024
- Lam Research Corporation
- Feng Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatically clamped edge ring
- Patent number 11,935,776
- Issue date Mar 19, 2024
- Lam Research Corporation
- Christopher Kimball
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-plate electrostatic chucks with ceramic baseplates
- Patent number 11,848,177
- Issue date Dec 19, 2023
- Lam Research Corporation
- Feng Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic baseplate with channels having non-square corners
- Patent number 11,133,211
- Issue date Sep 28, 2021
- Lam Research Corporation
- Feng Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatically clamped edge ring
- Patent number 10,923,380
- Issue date Feb 16, 2021
- Lam Research Corporation
- Christopher Kimball
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatically clamped edge ring
- Patent number 9,922,857
- Issue date Mar 20, 2018
- Lam Research Corporation
- Christopher Kimball
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTI-PLATE ELECTROSTATIC CHUCKS WITH CERAMIC BASEPLATES
- Publication number 20240112893
- Publication date Apr 4, 2024
- LAM RESEARCH CORPORATION
- Feng WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COOLANT CHANNEL WITH INTERNAL FINS FOR SUBSTRATE PROCESSING PEDESTALS
- Publication number 20230087913
- Publication date Mar 23, 2023
- LAM RESEARCH CORPORATION
- Feng WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH CERAMIC MONOLITHIC BODY
- Publication number 20220148903
- Publication date May 12, 2022
- LAM RESEARCH CORPORATION
- Feng WANG
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
ELECTROSTATICALLY CLAMPED EDGE RING
- Publication number 20210166965
- Publication date Jun 3, 2021
- LAM RESEARCH CORPORATION
- Christopher KIMBALL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC BASEPLATE WITH CHANNELS HAVING NON-SQUARE CORNERS
- Publication number 20200066564
- Publication date Feb 27, 2020
- LAM RESEARCH CORPORATION
- Feng Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-PLATE ELECTROSTATIC CHUCKS WITH CERAMIC BASEPLATES
- Publication number 20190267218
- Publication date Aug 29, 2019
- LAM RESEARCH CORPORATION
- Feng WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATICALLY CLAMPED EDGE RING
- Publication number 20180166312
- Publication date Jun 14, 2018
- LAM RESEARCH CORPORATION
- Christopher KIMBALL
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Electrostatic chuck with ceramic monolithic body

Electrostatically clamped edge ring

Multi-plate electrostatic chucks with ceramic baseplates

Ceramic baseplate with channels having non-square corners

Electrostatically clamped edge ring

Electrostatically clamped edge ring

Patents Applicationslast 30 patents

MULTI-PLATE ELECTROSTATIC CHUCKS WITH CERAMIC BASEPLATES

COOLANT CHANNEL WITH INTERNAL FINS FOR SUBSTRATE PROCESSING PEDESTALS

ELECTROSTATIC CHUCK WITH CERAMIC MONOLITHIC BODY

ELECTROSTATICALLY CLAMPED EDGE RING

CERAMIC BASEPLATE WITH CHANNELS HAVING NON-SQUARE CORNERS

MULTI-PLATE ELECTROSTATIC CHUCKS WITH CERAMIC BASEPLATES

ELECTROSTATICALLY CLAMPED EDGE RING