Feng XU

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Sichuan, CN

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Patents Grantslast 30 patents

Information Patent Grant
Focus detection apparatus for projection lithography system
- Patent number 8,760,626
- Issue date Jun 24, 2014
- The Institute of Optics and Electronics
- Jinlong Li
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
FOCUS DETECTION APPARATUS FOR PROJECTION LITHOGRAPHY SYSTEM
- Publication number 20130027679
- Publication date Jan 31, 2013
- The Institute of Optics and Electronics, The Chinese Academy of Sciences
- Jinlong LI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY