Fenghui ZHU

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Beijing, CN

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Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for etching a substrate
- Patent number 11,581,161
- Issue date Feb 14, 2023
- ASML Netherlands, B.V.
- Jie Fang
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR ETCHING A SUBSTRATE
- Publication number 20200211817
- Publication date Jul 2, 2020
- ASML NETHERLANDS B.V.
- Jie FANG
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR