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Fenton R. Feeney
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Ossining, NY, US
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TiC as a thermally stable p-metal carbide on high k SiO2 gate stacks
Patent number
8,288,237
Issue date
Oct 16, 2012
International Business Machines Corporation
Alessandro C. Callegari
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...