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Fenton R. McFeely
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Ossining, NY, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method and structure to improve the conductivity of narrow copper f...
Patent number
9,392,690
Issue date
Jul 12, 2016
GLOBALFOUNDRIES Inc.
Fenton R. McFeely
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method to fabricate copper wiring structures and structures formed...
Patent number
9,343,407
Issue date
May 17, 2016
GLOBALFOUNDRIES Inc.
Fenton Read McFeely
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to fabricate copper wiring structures and structures formed...
Patent number
9,048,296
Issue date
Jun 2, 2015
International Business Machines Corporation
Fenton Read McFeely
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Structure and process for metallization in high aspect ratio features
Patent number
8,785,320
Issue date
Jul 22, 2014
International Business Machines Corporation
Chih-Chao Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Techniques for forming narrow copper filled vias having improved co...
Patent number
8,661,664
Issue date
Mar 4, 2014
International Business Machines Corporation
Fenton Read McFeely
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Noble metal cap for interconnect structures
Patent number
8,497,580
Issue date
Jul 30, 2013
International Business Machines Corporation
Chih-Chao Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Structure and process for metallization in high aspect ratio features
Patent number
8,450,204
Issue date
May 28, 2013
International Business Machines Corporation
Chih-Chao Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical vapor deposition method for the incorporation of nitrogen...
Patent number
8,258,495
Issue date
Sep 4, 2012
International Business Machines Corporation
Jennifer L. Gardner
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Activation of graphene buffer layers on silicon carbide by ultra lo...
Patent number
8,242,030
Issue date
Aug 14, 2012
International Business Machines Corporation
James B. Hannon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Structure and process for metallization in high aspect ratio features
Patent number
8,232,647
Issue date
Jul 31, 2012
International Business Machines Corporation
Chih-Chao Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming metal/high-κ gate stacks with high mobility
Patent number
8,153,514
Issue date
Apr 10, 2012
International Business Machines Corporation
Wanda Andreoni
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Noble metal cap for interconnect structures
Patent number
7,998,864
Issue date
Aug 16, 2011
International Business Machines Corporation
Chih-Chao Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Structure to facilitate plating into high aspect ratio vias
Patent number
7,964,497
Issue date
Jun 21, 2011
International Business Machines Corporation
Fenton R. McFeely
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for improving the selectivity of a CVD process
Patent number
7,884,018
Issue date
Feb 8, 2011
International Business Machines Corporation
Fenton R. McFeely
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
High temperature processing compatible metal gate electrode for pFE...
Patent number
7,863,083
Issue date
Jan 4, 2011
International Business Machines Corporation
Ricky Amos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Formation of aligned capped metal lines and interconnections in mul...
Patent number
7,825,516
Issue date
Nov 2, 2010
International Business Machines Corporation
Stefanie Ruth Chiras
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal catalyzed selective deposition of materials including germani...
Patent number
7,820,474
Issue date
Oct 26, 2010
International Business Machines Corporation
Supratik Guha
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Chemical vapor deposition method for the incorporation of nitrogen...
Patent number
7,772,120
Issue date
Aug 10, 2010
International Business Machines Corporation
Jennifer L. Gardner
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Process for chemical vapor deposition of materials with via filling...
Patent number
7,749,802
Issue date
Jul 6, 2010
International Business Machines Corporation
Fenton R. McFeely
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for increasing deposition rates of metal layers from metal-c...
Patent number
7,678,421
Issue date
Mar 16, 2010
Tokyo Electron Limited
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
TiC as a thermally stable p-metal carbide on high k SiO2 gate stacks
Patent number
7,667,277
Issue date
Feb 23, 2010
International Business Machines Corporation
Alessandro C. Callegari
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Deposition of hafnium oxide and/or zirconium oxide and fabrication...
Patent number
7,566,938
Issue date
Jul 28, 2009
International Business Machines Corporation
Cyril Cabral, Jr.
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming HfSiN metal for n-FET applications
Patent number
7,521,346
Issue date
Apr 21, 2009
International Business Machines Corporation
Alessandro C. Callegari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for preparing solid precursor tray for use in solid precurso...
Patent number
7,488,512
Issue date
Feb 10, 2009
Tokyo Electron Limited
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Removal of charged defects from metal oxide-gate stacks
Patent number
7,488,656
Issue date
Feb 10, 2009
International Business Machines Corporation
Eduard A. Cartier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dispenser system for atomic beam assisted metal organic chemical va...
Patent number
7,439,180
Issue date
Oct 21, 2008
International Business Machines Corporation
Supratik Guha
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for processing a substrate
Patent number
7,419,702
Issue date
Sep 2, 2008
Tokyo Electron Limited
Kazuhito Nakamura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and system for refurbishing a metal carbonyl precursor
Patent number
7,345,184
Issue date
Mar 18, 2008
Tokyo Electron Limited
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for increasing deposition rates of metal layers from metal-c...
Patent number
7,270,848
Issue date
Sep 18, 2007
Tokyo Electron Limited
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for forming a passivated metal layer
Patent number
7,189,431
Issue date
Mar 13, 2007
Tokyo Electron Limited
Hideaki Yamasaki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHOD TO FABRICATE COPPER WIRING STRUCTURES AND STRUCTURES FORMED...
Publication number
20150194385
Publication date
Jul 9, 2015
International Business Machines Corporation
Fenton Read McFeely
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and Structure to Improve the Conductivity of Narrow Copper F...
Publication number
20140151097
Publication date
Jun 5, 2014
International Business Machines Corporation
Fenton R. McFeely
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STRUCTURE AND PROCESS FOR METALLIZATION IN HIGH ASPECT RATIO FEATURES
Publication number
20130252415
Publication date
Sep 26, 2013
International Business Machines Corporation
Chih-Chao Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD TO FABRICATE COPPER WIRING STRUCTURES AND STRUCTURES FORMED...
Publication number
20120205804
Publication date
Aug 16, 2012
International Business Machines Corporation
Fenton Read McFeely
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STRUCTURE AND PROCESS FOR METALLIZATION IN HIGH ASPECT RATIO FEATURES
Publication number
20120208362
Publication date
Aug 16, 2012
International Business Machines Corporation
Chih-Chao Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and Structure to Improve the Conductivity of Narrow Copper F...
Publication number
20120012372
Publication date
Jan 19, 2012
International Business Machines Corporation
Fenton Read McFeely
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
NOBLE METAL CAP FOR INTERCONNECT STRUCTURES
Publication number
20110285021
Publication date
Nov 24, 2011
International Business Machines Corporation
Chih-Chao Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ACTIVATION OF GRAPHENE BUFFER LAYERS ON SILICON CARBIDE BY ULTRA LO...
Publication number
20110073834
Publication date
Mar 31, 2011
International Business Machines Corporation
James B. Hannon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Low Temperature Plasma-Free Method for the Nitridation of Copper
Publication number
20110052797
Publication date
Mar 3, 2011
International Business Machines Corporation
Fenton Read McFeely
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Multi-Step Method to Selectively Deposit Ruthenium Layers of Arbitr...
Publication number
20110045171
Publication date
Feb 24, 2011
International Business Machines Corporation
Fenton Read McFeely
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CHEMICAL VAPOR DEPOSITION METHOD FOR THE INCORPORATION OF NITROGEN...
Publication number
20100264398
Publication date
Oct 21, 2010
International Business Machines Corporation
Jennifer L. Gardner
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TiC AS A THERMALLY STABLE p-METAL CARBIDE ON HIGH k SiO2 GATE STACKS
Publication number
20100015790
Publication date
Jan 21, 2010
International Business Machines Corporation
Alessandro C. Callegari
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROCESS FOR CHEMICAL VAPOR DEPOSITION OF MATERIALS WITH VIA FILLING...
Publication number
20100009164
Publication date
Jan 14, 2010
International Business Machines Corporation
Fenton R. McFeely
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Structure to Facilitate Plating Into High Aspect Ratio Vias
Publication number
20090321933
Publication date
Dec 31, 2009
International Business Machines Corporation
Fenton R. McFeely
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR DEPOSITION OF AN ULTRA-THIN ELECTROPOSITIVE METAL-CONTAI...
Publication number
20090294876
Publication date
Dec 3, 2009
International Business Machines Corporation
Supratik Guha
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
STRUCTURE AND PROCESS FOR METALLIZATION IN HIGH ASPECT RATIO FEATURES
Publication number
20090212433
Publication date
Aug 27, 2009
International Business Machines Corporation
Chih-Chao Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NOBLE METAL CAP FOR INTERCONNECT STRUCTURES
Publication number
20090189287
Publication date
Jul 30, 2009
International Business Machines Corporation
Chih-Chao Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR DEPOSITION OF AN ULTRA-THIN ELECTROPOSITIVE METAL-CONTAI...
Publication number
20090008725
Publication date
Jan 8, 2009
International Business Machines Corporation
Supratik Guha
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR IMPROVING THE SELECTIVITY OF A CVD PROCESS
Publication number
20080315429
Publication date
Dec 25, 2008
Fenton R. McFeely
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
High Temperature Processing Compatible Metal Gate Electrode For pFE...
Publication number
20080311745
Publication date
Dec 18, 2008
International Business Machines Corporation
Ricky Amos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING METAL/HIGH-k GATE STACKS WITH HIGH MOBILITY
Publication number
20080293259
Publication date
Nov 27, 2008
International Business Machines Corporation
Wanda Andreoni
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING HfSiN METAL FOR n-FET APPLICATIONS
Publication number
20080245658
Publication date
Oct 9, 2008
International Business Machines Corporation
Alessandro C. Callegari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METAL CATALYZED SELECTIVE DEPOSITION OF MATERIALS INCLUDING GERMANI...
Publication number
20080166586
Publication date
Jul 10, 2008
International Business Machines Corporation
Supratik Guha
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PROCESS FOR CHEMICAL VAPOR DEPOSITION OF MATERIALS WITH VIA FILLING...
Publication number
20080164579
Publication date
Jul 10, 2008
International Business Machines Corporation
Fenton R. McFeely
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CHEMICAL VAPOR DEPOSITION METHOD FOR THE INCORPORATION OF NITROGEN...
Publication number
20080164580
Publication date
Jul 10, 2008
International Business Machines Corporation
Jennifer L. Gardner
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF FORMING HfSiN METAL FOR n-FET APPLICATIONS
Publication number
20080038905
Publication date
Feb 14, 2008
International Business Machines Corporation
Alessandro C. Callegari
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dispenser system for atomic beam assisted metal organic chemical va...
Publication number
20080026575
Publication date
Jan 31, 2008
International Business Machines Corporation
Supratik Guha
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR INCREASING DEPOSITION RATES OF METAL LAYERS FROM METAL-C...
Publication number
20080003360
Publication date
Jan 3, 2008
TOKYO ELECTRON LIMITED
Kenji Suzuki
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of forming metal/high-k gate stacks with high mobility
Publication number
20060289903
Publication date
Dec 28, 2006
Wanda Andreoni
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Removal of charged defects from metal oxide-gate stacks
Publication number
20060246740
Publication date
Nov 2, 2006
International Business Machines Corporation
Eduard A. Cartier
H01 - BASIC ELECTRIC ELEMENTS