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Ferry Michael Postma
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Hoek Van Holland, NL
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last 30 patents
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Patent Grant
Charged particle multi-beamlet lithography system, modulation devic...
Patent number
8,987,677
Issue date
Mar 24, 2015
Mapper Lithography IP B.V.
Marco Jan-Jaco Wieland
B82 - NANO-TECHNOLOGY
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last 30 patents
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Patent Application
Charged particle multi-beamlet lithography system, modulation devic...
Publication number
20110266418
Publication date
Nov 3, 2011
MAPPER LITHOGRAPHY IP BV
Marco Jan-Jaco Wieland
B82 - NANO-TECHNOLOGY