Filippos Farmakis

Follow

Person

Traklio Attikis, GR

People

Patents Applicationslast 30 patents

Information Patent Application
CLEANING MEANS FOR LARGE AREA PECVD DEVICES USING A REMOTE PLASMA S...
- Publication number 20080035169
- Publication date Feb 14, 2008
- OC OERLIKON BALZERS AG
- Filippos Farmakis
- B08 - CLEANING