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Flemming Tinker
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Cheshire, CT, US
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Patents Grants
last 30 patents
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Patent Grant
Strain-isolated stage mirror
Patent number
6,646,779
Issue date
Nov 11, 2003
Zygo Corporation
Peter B. Mumola
G02 - OPTICS
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Patent Grant
In-situ metrology system and method
Patent number
6,301,009
Issue date
Oct 9, 2001
Zygo Corporation
Flemming Tinker
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
Strain-isolated stage mirror
Publication number
20020085262
Publication date
Jul 4, 2002
Peter B. Mumola
G02 - OPTICS