Flora Fong-Song CHANG

Person

Saratoga, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Arsenic diffusion profile engineering for transistors
- Patent number 12,249,626
- Issue date Mar 11, 2025
- Applied Materials, Inc.
- Patricia M. Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature profile measurement and synchronized control on substra...
- Patent number 12,196,617
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Zuoming Zhu
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing monitoring
- Patent number 12,165,934
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Zuoming Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ temperature mapping for epi chamber
- Patent number 11,261,538
- Issue date Mar 1, 2022
- Applied Materials, Inc.
- Ala Moradian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transistor and method for forming a transistor
- Patent number 11,195,914
- Issue date Dec 7, 2021
- Applied Materials, Inc.
- Patricia M. Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for selective epitaxy
- Patent number 10,504,723
- Issue date Dec 10, 2019
- Applied Materials, Inc.
- Xuebin Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective process for source and drain formation
- Patent number 10,276,688
- Issue date Apr 30, 2019
- Applied Materials, Inc.
- Xinyu Bao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Selective process for source and drain formation
- Patent number 9,923,081
- Issue date Mar 20, 2018
- Applied Materials, Inc.
- Xinyu Bao
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING MONITORING
- Publication number 20250096045
- Publication date Mar 20, 2025
- Applied Materials, Inc.
- Zuoming ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CONTROLLING LAYER-TO-LAYER THICKNESS IN MULTI-TIER EPITA...
- Publication number 20240247405
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Alexandros ANASTASOPOULOS
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD AND APPARATUS FOR LOW TEMPERATURE SELECTIVE EPITAXY IN A DEE...
- Publication number 20230036426
- Publication date Feb 2, 2023
- Applied Materials, Inc.
- Abhishek DUBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMATION OF A SIGE/SI SUPERLATTICE
- Publication number 20230029344
- Publication date Jan 26, 2023
- Applied Materials, Inc.
- John TOLLE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ARSENIC DIFFUSION PROFILE ENGINEERING FOR TRANSISTORS
- Publication number 20220320294
- Publication date Oct 6, 2022
- Applied Materials, Inc.
- Patricia M. LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DETECTION USING OPTICAL EMISSION SPECTROSCOPY
- Publication number 20220283029
- Publication date Sep 8, 2022
- Applied Materials, Inc.
- Zuoming ZHU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE PROFILE MEASUREMENT AND SYNCHRONIZED CONTROL ON SUBSTRA...
- Publication number 20220155148
- Publication date May 19, 2022
- Applied Materials, Inc.
- Zuoming ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU TEMPERATURE MAPPING FOR EPI CHAMBER
- Publication number 20220090293
- Publication date Mar 24, 2022
- Applied Materials, Inc.
- Ala MORADIAN
- C30 - CRYSTAL GROWTH
Information Patent Application
TRANSISTOR AND METHOD FOR FORMING A TRANSISTOR
- Publication number 20210028280
- Publication date Jan 28, 2021
- Applied Materials, Inc.
- Patricia M. LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING MONITORING
- Publication number 20210028075
- Publication date Jan 28, 2021
- Applied Materials, Inc.
- Zuoming ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW TEMPERATURE IN-SITU CLEANING METHOD FOR EPI-CHAMBERS
- Publication number 20190301011
- Publication date Oct 3, 2019
- Applied Materials, Inc.
- Geetika BAJAJ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE PROCESS FOR SOURCE AND DRAIN FORMATION
- Publication number 20180286961
- Publication date Oct 4, 2018
- Applied Materials, Inc.
- Xinyu BAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR LOW TEMPERATURE SELECTIVE EPITAXY IN A DEE...
- Publication number 20180230624
- Publication date Aug 16, 2018
- Applied Materials, Inc.
- Abhishek DUBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR SELECTIVE EPITAXY
- Publication number 20180190489
- Publication date Jul 5, 2018
- Applied Materials, Inc.
- Xuebin LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF SELECTIVE ETCHING ON EPITAXIAL FILM ON SOURCE/DRAIN AREA...
- Publication number 20170323795
- Publication date Nov 9, 2017
- Applied Materials, Inc.
- Xuebin LI
- H01 - BASIC ELECTRIC ELEMENTS

Flora Fong-Song CHANG

Person

Patents Grantslast 30 patents

Arsenic diffusion profile engineering for transistors

Temperature profile measurement and synchronized control on substra...

Substrate processing monitoring

In-situ temperature mapping for epi chamber

Transistor and method for forming a transistor

Method and apparatus for selective epitaxy

Selective process for source and drain formation

Selective process for source and drain formation

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING MONITORING

METHOD FOR CONTROLLING LAYER-TO-LAYER THICKNESS IN MULTI-TIER EPITA...

METHOD AND APPARATUS FOR LOW TEMPERATURE SELECTIVE EPITAXY IN A DEE...

METHODS OF FORMATION OF A SIGE/SI SUPERLATTICE

ARSENIC DIFFUSION PROFILE ENGINEERING FOR TRANSISTORS

METHODS FOR DETECTION USING OPTICAL EMISSION SPECTROSCOPY

TEMPERATURE PROFILE MEASUREMENT AND SYNCHRONIZED CONTROL ON SUBSTRA...

IN-SITU TEMPERATURE MAPPING FOR EPI CHAMBER

TRANSISTOR AND METHOD FOR FORMING A TRANSISTOR

SUBSTRATE PROCESSING MONITORING

LOW TEMPERATURE IN-SITU CLEANING METHOD FOR EPI-CHAMBERS

SELECTIVE PROCESS FOR SOURCE AND DRAIN FORMATION

METHOD AND APPARATUS FOR LOW TEMPERATURE SELECTIVE EPITAXY IN A DEE...

METHOD AND APPARATUS FOR SELECTIVE EPITAXY

METHOD OF SELECTIVE ETCHING ON EPITAXIAL FILM ON SOURCE/DRAIN AREA...