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Florence Luo
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Valley Cottage, NY, US
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Patents Grants
last 30 patents
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Patent Grant
Method and system for active purging of pellicle volumes
Patent number
7,619,718
Issue date
Nov 17, 2009
ASML Holding N.V.
Florence Luo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for a pellicle frame with porous filtering ins...
Patent number
6,847,434
Issue date
Jan 25, 2005
ASML Holding N.V.
Joseph Laganza
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Method and apparatus for a reticle with purged pellicle-to-reticle gap
Publication number
20050151955
Publication date
Jul 14, 2005
ASML Holding N.V.
Joseph Laganza
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and apparatus for a reticle with purged pellicle-to-reticle gap
Publication number
20030123042
Publication date
Jul 3, 2003
Joseph Laganza
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY