Florian BAUMER

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Oberkochen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Metrology system and method for measuring an excitation laser beam...
- Patent number 11,920,977
- Issue date Mar 5, 2024
- Carl Zeiss SMT GmbH
- Matthias Manger
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Device and method for measuring the beam angle of a light beam guid...
- Patent number 11,737,199
- Issue date Aug 22, 2023
- Carl Zeiss SMT GmbH
- Florian Baumer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for replacing a mirror in a projection exposure apparatus, a...
- Patent number 11,500,294
- Issue date Nov 15, 2022
- Carl Zeiss SMT GmbH
- Christoph Petri
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for restoring an illumination system for an EUV apparatus, a...
- Patent number 11,048,173
- Issue date Jun 29, 2021
- Carl Zeiss SMT GmbH
- Florian Baumer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for analyzing a light beam guided by a beam guidi...
- Patent number 9,823,119
- Issue date Nov 21, 2017
- Carl Zeiss SMT GmbH
- Matthias Manger
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
ARRANGEMENT, METHOD AND COMPUTER PROGRAM PRODUCT FOR CALIBRATING FA...
- Publication number 20250028250
- Publication date Jan 23, 2025
- Carl Zeiss SMT GMBH
- Florian Baumer
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR REPLACING A MIRROR IN A PROJECTION EXPOSURE APPARATUS, A...
- Publication number 20210294222
- Publication date Sep 23, 2021
- Carl Zeiss SMT GMBH
- Christoph PETRI
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR MEASURING THE BEAM ANGLE OF A LIGHT BEAM GUID...
- Publication number 20210219409
- Publication date Jul 15, 2021
- Carl Zeiss SMT GMBH
- Florian BAUMER
- G02 - OPTICS
Information Patent Application
METROLOGY SYSTEM AND METHOD FOR MEASURING AN EXCITATION LASER BEAM...
- Publication number 20210190583
- Publication date Jun 24, 2021
- Carl Zeiss SMT GMBH
- Matthias MANGER
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR RESTORING AN ILLUMINATION SYSTEM FOR AN EUV APPARATUS, A...
- Publication number 20200249575
- Publication date Aug 6, 2020
- Carl Zeiss SMT GMBH
- Florian Baumer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR ANALYZING A LIGHT BEAM GUIDED BY A BEAM GUIDI...
- Publication number 20170122803
- Publication date May 4, 2017
- Carl Zeiss SMT GMBH
- Matthias MANGER
- G02 - OPTICS