Florian Herold

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Aalen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Optical element, in particular for a microlithographic projection e...
- Patent number 10,578,974
- Issue date Mar 3, 2020
- Carl Zeiss SMT GmbH
- Ralf Moser
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY WITH A...
- Publication number 20230081234
- Publication date Mar 16, 2023
- Carl Zeiss SMT GMBH
- Philipp Gaida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ELEMENT, IN PARTICULAR FOR A MICROLITHOGRAPHIC PROJECTION E...
- Publication number 20190302624
- Publication date Oct 3, 2019
- Carl Zeiss SMT GMBH
- Ralf Moser
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY