Folkert Draaisma

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Delft, NL

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Patents Grantslast 30 patents

Information Patent Grant
Detector system for detecting a height of a particle, and lithograp...
- Patent number 7,173,270
- Issue date Feb 6, 2007
- ASML Netherlands B.V.
- Anastasius Jacobus Anicetus Bruinsma
- G01 - MEASURING TESTING