Fong-Jie DU

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate transporter and substrate processing apparatus including...
- Patent number 12,237,194
- Issue date Feb 25, 2025
- EBARA CORPORATION
- Akihiro Yazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing head and polishing apparatus
- Patent number 11,331,768
- Issue date May 17, 2022
- Ebara Corporation
- Makoto Kashiwagi
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,180,853
- Issue date Nov 23, 2021
- Ebara Corporation
- Yu Ishii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,458,020
- Issue date Oct 29, 2019
- Ebara Corporation
- Yu Ishii
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSPORTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING...
- Publication number 20220005716
- Publication date Jan 6, 2022
- EBARA CORPORATION
- Akihiro Yazawa
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20190390335
- Publication date Dec 26, 2019
- EBARA CORPORATION
- Yu ISHII
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POLISHING HEAD AND POLISHING APPARATUS
- Publication number 20190184519
- Publication date Jun 20, 2019
- EBARA CORPORATION
- Makoto KASHIWAGI
- B24 - GRINDING POLISHING