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Forrest Gilbert Yetter, Jr.
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Austin, TX, US
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last 30 patents
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Patent Grant
Determining process condition in substrate processing module
Patent number
8,046,193
Issue date
Oct 25, 2011
KLA-Tencor Corporation
Forrest Gilbert Yetter, Jr.
G05 - CONTROLLING REGULATING
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Patent Grant
Methods of configuring a sensor network
Patent number
7,363,195
Issue date
Apr 22, 2008
SensArray Corporation
Forrest Gilbert Yetter, Jr.
G05 - CONTROLLING REGULATING