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Sassenage, FR
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Patents Grants
last 30 patents
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Patent Grant
Method for producing a suspended element in a micro-machined structure
Patent number
6,365,056
Issue date
Apr 2, 2002
Commissariat a l'Energie Atomique
Philippe Robert
G01 - MEASURING TESTING
Information
Patent Grant
Method for manufacturing a structure with a useful layer held at a...
Patent number
5,750,420
Issue date
May 12, 1998
Commissariat a l'Energie Atomique
Hubert Bono
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated accelerometer with a sensitive axis parallel to the subs...
Patent number
5,495,761
Issue date
Mar 5, 1996
Commissariat a l'Energie Atomique
Bernard Diem
G01 - MEASURING TESTING
Information
Patent Grant
Directional accelerometer and its microlithographic fabrication pro...
Patent number
4,653,326
Issue date
Mar 31, 1987
Commissariat a l'Energie Atomique
Jean-Sebastien Danel
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Method for making a planar suspended microstructure, using a sacrif...
Publication number
20060138076
Publication date
Jun 29, 2006
Philippe Robert
B81 - MICRO-STRUCTURAL TECHNOLOGY