Francis Ko

Person

Taichuang, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Clustering for prediction models in process control and for optimal...
- Patent number 9,037,279
- Issue date May 19, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Francis Ko
- G05 - CONTROLLING REGULATING
Information Patent Grant
Forming interconnect structures using pre-ink-printed sheets
- Patent number 8,716,867
- Issue date May 6, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Francis Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automatic virtual metrology for semiconductor wafer result prediction
- Patent number 8,682,466
- Issue date Mar 25, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Francis Ko
- G05 - CONTROLLING REGULATING
Information Patent Grant
Near non-adaptive virtual metrology and chamber control
- Patent number 8,433,434
- Issue date Apr 30, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Amy Wang
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and system for controlling copper chemical mechanical polish...
- Patent number 8,409,993
- Issue date Apr 2, 2013
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Francis Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methodology to enable wafer result prediction of semiconductor wafe...
- Patent number 8,145,337
- Issue date Mar 27, 2012
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Hsien Lin
- G05 - CONTROLLING REGULATING
Information Patent Grant
System for extraction of key process parameters from fault detectio...
- Patent number 7,974,728
- Issue date Jul 5, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Hsien Lin
- G05 - CONTROLLING REGULATING
Information Patent Grant
System and method for enhanced control of copper trench sheet resis...
- Patent number 7,851,234
- Issue date Dec 14, 2010
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Francis Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Auto routing for optimal uniformity control
- Patent number 7,767,471
- Issue date Aug 3, 2010
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jean Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for yield and productivity improvements in semico...
- Patent number 7,642,100
- Issue date Jan 5, 2010
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chen-Hua Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Prediction of uniformity of a wafer
- Patent number 7,634,325
- Issue date Dec 15, 2009
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jean Wang
- G01 - MEASURING TESTING
Information Patent Grant
Method for argon plasma induced ultraviolet light curing step for i...
- Patent number 7,160,671
- Issue date Jan 9, 2007
- Lam Research Corporation
- Francis Ko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus to enable accurate wafer prediction
- Patent number 7,144,297
- Issue date Dec 5, 2006
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Hsien Lin
- G05 - CONTROLLING REGULATING
Information Patent Grant
Plasma enhanced method for increasing silicon-containing photoresis...
- Patent number 6,799,907
- Issue date Oct 5, 2004
- Lam Research Corporation
- Francis Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Overcurrent protection circuit, electric leakage protection circuit...
- Patent number 6,633,471
- Issue date Oct 14, 2003
- Frank Ko
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
All dual damascene oxide etch process steps in one confined plasma...
- Patent number 6,559,049
- Issue date May 6, 2003
- Lam Research Corporation
- Lawrence Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma enhanced method for increasing silicon-containing photoresis...
- Patent number 6,541,361
- Issue date Apr 1, 2003
- LAM Research Corp.
- Francis Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Collapsible paper, book holder
- Patent number 6,290,200
- Issue date Sep 18, 2001
- Frank Ko
- A47 - FURNITURE DOMESTIC ARTICLES OR APPLIANCES COFFEE MILLS SPICE MILLS SUCT...
Information Patent Grant
Warning device of overload or overheat for the electric cords, cabl...
- Patent number 6,005,484
- Issue date Dec 21, 1999
- Frank Ko
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Forming Interconnect Structures Using Pre-Ink-Printed Sheets
- Publication number 20110277655
- Publication date Nov 17, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Francis Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Clustering for Prediction Models in Process Control and for Optimal...
- Publication number 20110060441
- Publication date Mar 10, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Francis Ko
- G05 - CONTROLLING REGULATING
Information Patent Application
Near Non-Adaptive Virtual Metrology and Chamber Control
- Publication number 20110009998
- Publication date Jan 13, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Amy Wang
- G05 - CONTROLLING REGULATING
Information Patent Application
SYSTEM AND METHOD FOR ENHANCED CONTROL OF COPPER TRENCH SHEET RESIS...
- Publication number 20090142860
- Publication date Jun 4, 2009
- Taiwan Semiconductor Manufacturing Co., LTD
- Francis Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Auto Routing for Optimal Uniformity Control
- Publication number 20090035883
- Publication date Feb 5, 2009
- Jean Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and system for controlling copper chemical mechanical polish...
- Publication number 20080305563
- Publication date Dec 11, 2008
- Francis Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTRACTION OF KEY PROCESS PARAMETER
- Publication number 20080275585
- Publication date Nov 6, 2008
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Hsien Lin
- G05 - CONTROLLING REGULATING
Information Patent Application
METHODOLOGY TO ENABLE WAFER RESULT PREDICTION OF BATCH TOOLS
- Publication number 20080275676
- Publication date Nov 6, 2008
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Hsien Lin
- G05 - CONTROLLING REGULATING
Information Patent Application
Novel Methodology To Realize Automatic Virtual Metrology
- Publication number 20080275586
- Publication date Nov 6, 2008
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Francis Ko
- G05 - CONTROLLING REGULATING
Information Patent Application
PREDICTION OF UNIFORMITY OF A WAFER
- Publication number 20080275588
- Publication date Nov 6, 2008
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jean Wang
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR YIELD AND PRODUCTIVITY IMPROVEMENTS IN SEMICO...
- Publication number 20080064127
- Publication date Mar 13, 2008
- Taiwan Semiconductor Manufacturing Co., LTD
- Chen-Hua Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for argon plasma induced ultraviolet light cur...
- Publication number 20070072095
- Publication date Mar 29, 2007
- Lam Research Corporation
- Francis Ko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS TO ENABLE ACCURATE WAFER PREDICTION
- Publication number 20060252348
- Publication date Nov 9, 2006
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Hsien Lin
- G05 - CONTROLLING REGULATING
Information Patent Application
Novel method and apparatus for integrating fault detection and real...
- Publication number 20060129257
- Publication date Jun 15, 2006
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ping-Hsu Chen
- G05 - CONTROLLING REGULATING
Information Patent Application
FIB exposure of alignment marks in MIM technology
- Publication number 20050186753
- Publication date Aug 25, 2005
- Ping-Hsu Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Plasma enhanced method for increasing silicon-containing photoresis...
- Publication number 20030129816
- Publication date Jul 10, 2003
- Francis Ko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
All dual damascene oxide etch process steps in one confined plasma...
- Publication number 20030032278
- Publication date Feb 13, 2003
- LAM RESEARCH CORPORATION
- Lawrence Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for argon plasma induced ultraviolet light cur...
- Publication number 20030003407
- Publication date Jan 2, 2003
- Francis Ko
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PLASMA ENHANCED METHOD FOR INCREASING SILICON-CONTAINING PHOTORESIS...
- Publication number 20030003683
- Publication date Jan 2, 2003
- Francis Ko
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Clustering for prediction models in process control and for optimal...

Forming interconnect structures using pre-ink-printed sheets

Automatic virtual metrology for semiconductor wafer result prediction

Near non-adaptive virtual metrology and chamber control

Method and system for controlling copper chemical mechanical polish...

Methodology to enable wafer result prediction of semiconductor wafe...

System for extraction of key process parameters from fault detectio...

System and method for enhanced control of copper trench sheet resis...

Auto routing for optimal uniformity control

Method and system for yield and productivity improvements in semico...

Prediction of uniformity of a wafer

Method for argon plasma induced ultraviolet light curing step for i...

Method and apparatus to enable accurate wafer prediction

Plasma enhanced method for increasing silicon-containing photoresis...

Overcurrent protection circuit, electric leakage protection circuit...

All dual damascene oxide etch process steps in one confined plasma...

Plasma enhanced method for increasing silicon-containing photoresis...

Collapsible paper, book holder

Warning device of overload or overheat for the electric cords, cabl...

Patents Applicationslast 30 patents

Forming Interconnect Structures Using Pre-Ink-Printed Sheets

Clustering for Prediction Models in Process Control and for Optimal...

Near Non-Adaptive Virtual Metrology and Chamber Control

SYSTEM AND METHOD FOR ENHANCED CONTROL OF COPPER TRENCH SHEET RESIS...

Auto Routing for Optimal Uniformity Control

Method and system for controlling copper chemical mechanical polish...

EXTRACTION OF KEY PROCESS PARAMETER

METHODOLOGY TO ENABLE WAFER RESULT PREDICTION OF BATCH TOOLS

Novel Methodology To Realize Automatic Virtual Metrology

PREDICTION OF UNIFORMITY OF A WAFER

METHOD AND SYSTEM FOR YIELD AND PRODUCTIVITY IMPROVEMENTS IN SEMICO...

Apparatus and method for argon plasma induced ultraviolet light cur...

METHOD AND APPARATUS TO ENABLE ACCURATE WAFER PREDICTION

Novel method and apparatus for integrating fault detection and real...

FIB exposure of alignment marks in MIM technology

Plasma enhanced method for increasing silicon-containing photoresis...

All dual damascene oxide etch process steps in one confined plasma...

Apparatus and method for argon plasma induced ultraviolet light cur...

PLASMA ENHANCED METHOD FOR INCREASING SILICON-CONTAINING PHOTORESIS...