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Francisco Juarez
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Hybrid impedance matching for inductively coupled plasma system
Patent number
9,082,589
Issue date
Jul 14, 2015
Novellus Systems, Inc.
George Thomas
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for modulation of precursor exposure during a...
Patent number
7,700,155
Issue date
Apr 20, 2010
Novellus Systems, Inc.
Francisco Juarez
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Conductive planarization assembly for electrochemical mechanical pl...
Patent number
7,695,597
Issue date
Apr 13, 2010
Novellus Systems, Inc.
John Drewery
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Apparatus and methods for processing semiconductor substrates using...
Patent number
7,503,334
Issue date
Mar 17, 2009
Novellus Systems, Inc.
Krishnan Shrinivasan
B08 - CLEANING
Information
Patent Grant
Conductive contacts and methods for fabricating conductive contacts...
Patent number
7,391,086
Issue date
Jun 24, 2008
Novellus Systems, Inc.
John Drewery
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method and apparatus for introduction of solid precursors and react...
Patent number
6,951,765
Issue date
Oct 4, 2005
Novellus Systems, Inc.
Sanjay Gopinath
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Properties of a silica thin film produced by a rapid vapor depositi...
Patent number
6,867,152
Issue date
Mar 15, 2005
Novellus Systems, Inc.
Dennis M. Hausmann
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and methods for processing semiconductor substrates using...
Patent number
6,848,458
Issue date
Feb 1, 2005
Novellus Systems, Inc.
Krishnan Shrinivasan
B08 - CLEANING
Information
Patent Grant
Apparatus for maintaining wafer back side and edge exclusion during...
Patent number
6,550,484
Issue date
Apr 22, 2003
Novellus Systems, Inc.
Sanjay Gopinath
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
HYBRID IMPEDANCE MATCHING FOR INDUCTIVELY COUPLED PLASMA SYSTEM
Publication number
20150313000
Publication date
Oct 29, 2015
Novellus Systems, Inc.
George Thomas
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
HYBRID IMPEDANCE MATCHING FOR INDUCTIVELY COUPLED PLASMA SYSTEM
Publication number
20140097751
Publication date
Apr 10, 2014
George Thomas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR MODULATION OF PRECURSOR EXPOSURE DURING A...
Publication number
20100173074
Publication date
Jul 8, 2010
NOVELLUS SYSTEMS INC.
Francisco Juarez
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...