Franciscus B. M. van Bilsen

Person

  • Phoenix, AZ, US

Patents Applicationslast 30 patents

  • Information Patent Application

    Low mass wafer support system

    • Publication number 20020043337
    • Publication date Apr 18, 2002
    • Matthew G. Goodman
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...