Franciscus Bernardus Maria VAN BILSEN

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus with multiple alignment arrangements and ali...
- Patent number 8,345,245
- Issue date Jan 1, 2013
- ASML Netherlands B.V.
- Franciscus Bernardus Maria Van Bilsen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment systems and methods for lithographic systems
- Patent number 8,139,217
- Issue date Mar 20, 2012
- ASML Netherlands B.V.
- Franciscus Bernardus Maria Van Bilsen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus with multiple alignment arrangements and ali...
- Patent number 8,018,594
- Issue date Sep 13, 2011
- ASML Netherlands B.V.
- Franciscus Bernardus Maria Van Bilsen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic method
- Patent number 7,894,063
- Issue date Feb 22, 2011
- ASML Netherland B.V.
- Franciscus Bernardus Maria Van Bilsen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment systems and methods for lithographic systems
- Patent number 7,880,880
- Issue date Feb 1, 2011
- ASML Netherlands B.V.
- Franciscus Bernardus Maria Van Bilsen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for overlay control using dual metrology sampling
- Patent number 7,763,403
- Issue date Jul 27, 2010
- ASML Netherlands B.V.
- Franciscus Bernardus Maria Van Bilsen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for overlay control using dual metrology sampling
- Patent number 7,651,825
- Issue date Jan 26, 2010
- ASML Netherlands B.V.
- Franciscus Bernardus Maria Van Bilsen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus with multiple alignment arrangements and ali...
- Patent number 7,626,701
- Issue date Dec 1, 2009
- ASML Netherlands B.V.
- Franciscus Bernardus Maria Van Bilsen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment systems and methods for lithographic systems
- Patent number 7,439,531
- Issue date Oct 21, 2008
- ASML Netherlands B.V.
- Franciscus Bernardus Maria Van Bilsen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment measurement arrangement and alignment measurement method
- Patent number 7,414,722
- Issue date Aug 19, 2008
- ASML Netherlands B.V.
- Franciscus Bernardus Maria Van Bilsen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment systems and methods for lithographic systems
- Patent number 7,332,732
- Issue date Feb 19, 2008
- ASML Netherlands, B.V.
- Franciscus Bernardus Maria Van Bilsen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment systems and methods for lithographic systems
- Patent number 7,329,888
- Issue date Feb 12, 2008
- ASML Netherlands B.V.
- Franciscus Bernardus Maria Van Bilsen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment systems and methods for lithographic systems
- Patent number 7,297,971
- Issue date Nov 20, 2007
- ASML Netherlands B.V.
- Franciscus Bernardus Maria Van Bilsen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus with two-dimensional alignment measurement a...
- Patent number 7,271,907
- Issue date Sep 18, 2007
- ASML Netherlands B.V.
- Franciscus Bernardus Maria Van Bilsen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment strategy optimization method
- Patent number 7,042,552
- Issue date May 9, 2006
- ASML Netherlands B.V.
- Roy Werkman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC APPARATUS WITH MULTIPLE ALIGNMENT ARRANGEMENTS AND ALI...
- Publication number 20120008126
- Publication date Jan 12, 2012
- ASML NETHERLANDS B.V.
- Franciscus Bernardus Maria VAN BILSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ALIGNMENT SYSTEMS AND METHODS FOR LITHOGRAPHIC SYSTEMS
- Publication number 20110128520
- Publication date Jun 2, 2011
- ASML NETHERLANDS B.V.
- Franciscus Bernardus Maria Van Bilsen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS WITH MULTIPLE ALIGNMENT ARRANGEMENTS AND ALI...
- Publication number 20100091297
- Publication date Apr 15, 2010
- ASML NETHERLANDS B.V.
- Franciscus Bernardus Maria VAN BILSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM FOR OVERLAY CONTROL USING DUAL METROLOGY SAMPLING
- Publication number 20100085548
- Publication date Apr 8, 2010
- ASML NETHERLANDS B.V.
- Franciscus Bernardus Maria VAN BILSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Method
- Publication number 20090128832
- Publication date May 21, 2009
- ASML NETHERLANDS B.V.
- Franciscus Bernardus Maria VAN BILSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Alignment measurement arrangement and alignment measurement method
- Publication number 20070041015
- Publication date Feb 22, 2007
- ASML NETHERLANDS B.V.
- Franciscus Bernardus Maria Van Bilsen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and system for overlay control using dual metrology sampling
- Publication number 20060210893
- Publication date Sep 21, 2006
- ASML NETHERLANDS B.V.
- Franciscus Bernardus Maria Van Bilsen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus with two-dimensional alignment measurement a...
- Publication number 20060139642
- Publication date Jun 29, 2006
- ASML NETHERLANDS, B.V.
- Franciscus Bernardus Maria Van Bilsen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Franciscus Bernardus Maria VAN BILSEN

Person

Patents Grantslast 30 patents

Lithographic apparatus with multiple alignment arrangements and ali...

Alignment systems and methods for lithographic systems

Lithographic apparatus with multiple alignment arrangements and ali...

Lithographic method

Alignment systems and methods for lithographic systems

Method and system for overlay control using dual metrology sampling

Method and system for overlay control using dual metrology sampling

Lithographic apparatus with multiple alignment arrangements and ali...

Alignment systems and methods for lithographic systems

Alignment measurement arrangement and alignment measurement method

Alignment systems and methods for lithographic systems

Alignment systems and methods for lithographic systems

Alignment systems and methods for lithographic systems

Lithographic apparatus with two-dimensional alignment measurement a...

Alignment strategy optimization method

Patents Applicationslast 30 patents

LITHOGRAPHIC APPARATUS WITH MULTIPLE ALIGNMENT ARRANGEMENTS AND ALI...

ALIGNMENT SYSTEMS AND METHODS FOR LITHOGRAPHIC SYSTEMS

LITHOGRAPHIC APPARATUS WITH MULTIPLE ALIGNMENT ARRANGEMENTS AND ALI...

METHOD AND SYSTEM FOR OVERLAY CONTROL USING DUAL METROLOGY SAMPLING

Lithographic Method

Alignment measurement arrangement and alignment measurement method

Method and system for overlay control using dual metrology sampling

Lithographic apparatus with two-dimensional alignment measurement a...