Frank Auer

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Stage system and lithographic apparatus
- Patent number 11,556,066
- Issue date Jan 17, 2023
- ASML Netherlands B.V.
- Maarten Jozef Jansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate positioning system, lithographic apparatus and device man...
- Patent number 9,470,988
- Issue date Oct 18, 2016
- ASML Netherlands B.V.
- Engelbertus Antonius Fransiscus Van Der Pasch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, and motor cooling device
- Patent number 8,879,044
- Issue date Nov 4, 2014
- ASML Netherlands B.V.
- Frank Auer
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Lithographic apparatus provided with a swap bridge
- Patent number 8,189,174
- Issue date May 29, 2012
- ASML Netherlands B.V.
- Matthias Kruizinga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,936,443
- Issue date May 3, 2011
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, and motor cooling device
- Patent number 7,916,267
- Issue date Mar 29, 2011
- ASML Netherlands B.V.
- Frank Auer
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Lithographic apparatus and position sensor
- Patent number 7,830,495
- Issue date Nov 9, 2010
- ASML Netherlands B.V.
- Olaf Hubertus Wilhelmus Van Bruggen
- G01 - MEASURING TESTING
Information Patent Grant
Support device and lightographic apparatus
- Patent number 7,170,582
- Issue date Jan 30, 2007
- ASML Netherlands B.V.
- Hans Butler
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Supporting device, lithographic apparatus, and device manufacturing...
- Patent number 7,084,956
- Issue date Aug 1, 2006
- ASML Netherlands B.V.
- Johannes Adrianus Antonius Theodorus Dams
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
- Patent number 6,791,664
- Issue date Sep 14, 2004
- ASML Netherlands B.V.
- Frank Auer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 6,788,386
- Issue date Sep 7, 2004
- ASML Netherlands B.V.
- Hendrikus Herman Marie Cox
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic projection apparatus, supporting assembly and device m...
- Patent number 6,473,161
- Issue date Oct 29, 2002
- ASML Netherlands B.V.
- Martinus Agnes Willem Cuijpers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pneumatic support device with a controlled gas supply, and lithogra...
- Patent number 6,144,442
- Issue date Nov 7, 2000
- U.S. Philips Corp.
- Jacob J. 'T Mannetje
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
STAGE SYSTEM AND LITHOGRAPHIC APPARATUS
- Publication number 20220137517
- Publication date May 5, 2022
- ASML NETHERLANDS B.V.
- Maarten Jozef JANSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MAN...
- Publication number 20150277242
- Publication date Oct 1, 2015
- ASML NETHERLANDS B.V.
- Engelbertus Antonius Fransiscus Van Der Pasch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus, and Motor Cooling Device
- Publication number 20110194085
- Publication date Aug 11, 2011
- ASML NETHERLANDS B.V.
- Frank Auer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic Apparatus and Device Manufacturing Method
- Publication number 20110171759
- Publication date Jul 14, 2011
- ASML NETHERLANDS B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS PROVIDED WITH A SWAP BRIDGE
- Publication number 20100128241
- Publication date May 27, 2010
- ASML NETHERLANDS B.V.
- Matthias KRUIZINGA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and position sensor
- Publication number 20090015246
- Publication date Jan 15, 2009
- ASML NETHERLANDS B.V.
- Olaf Hubertus Wilhelmus Van Bruggen
- G01 - MEASURING TESTING
Information Patent Application
Lithographic apparatus, and motor cooling device
- Publication number 20080055576
- Publication date Mar 6, 2008
- ASML NETHERLANDS B.V.
- Frank Auer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20070263189
- Publication date Nov 15, 2007
- ASML NETHERLANDS B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Support device and lightographic apparatus
- Publication number 20060126040
- Publication date Jun 15, 2006
- ASML NETHERLANDS B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Supporting device, lithographic apparatus, and device manufacturing...
- Publication number 20050018160
- Publication date Jan 27, 2005
- ASML NETHERLANDS B.V.
- Johannes Adrianus Antonius Theodorus Dams
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20030197914
- Publication date Oct 23, 2003
- Hendrikus Herman Marie Cox
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, device manufacturing method, and device man...
- Publication number 20020149754
- Publication date Oct 17, 2002
- ASML NETHERLANDS B.V.
- Frank Auer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic projection apparatus, supporting assembly and device m...
- Publication number 20020005939
- Publication date Jan 17, 2002
- Martinus Agnes Willem Cuijpers
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Person

Patents Grantslast 30 patents

Stage system and lithographic apparatus

Substrate positioning system, lithographic apparatus and device man...

Lithographic apparatus, and motor cooling device

Lithographic apparatus provided with a swap bridge

Lithographic apparatus and device manufacturing method

Lithographic apparatus, and motor cooling device

Lithographic apparatus and position sensor

Support device and lightographic apparatus

Supporting device, lithographic apparatus, and device manufacturing...

Lithographic apparatus, device manufacturing method, and device man...

Lithographic apparatus and device manufacturing method

Lithographic projection apparatus, supporting assembly and device m...

Pneumatic support device with a controlled gas supply, and lithogra...

Patents Applicationslast 30 patents

STAGE SYSTEM AND LITHOGRAPHIC APPARATUS

SUBSTRATE POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MAN...

Lithographic Apparatus, and Motor Cooling Device

Lithographic Apparatus and Device Manufacturing Method

LITHOGRAPHIC APPARATUS PROVIDED WITH A SWAP BRIDGE

Lithographic apparatus and position sensor

Lithographic apparatus, and motor cooling device

Lithographic apparatus and device manufacturing method

Support device and lightographic apparatus

Supporting device, lithographic apparatus, and device manufacturing...

Lithographic apparatus and device manufacturing method

Lithographic apparatus, device manufacturing method, and device man...

Lithographic projection apparatus, supporting assembly and device m...