Frank Bernhard Sperling

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Nuenen, NL

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Patents Grantslast 30 patents

Information Patent Grant
Laser focussing module
- Patent number 12,007,693
- Issue date Jun 11, 2024
- ASML Netherlands B.V.
- Ruud Antonius Catharina Maria Beerens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Positioning device, control device and control method
- Patent number 9,507,276
- Issue date Nov 29, 2016
- Koninklijke Philips N.V.
- Anne Johannes Wilhelmus Van Lievenoogen
- G05 - CONTROLLING REGULATING
Information Patent Grant
Lithographic apparatus and method involving a ring to cover a gap b...
- Patent number 8,634,052
- Issue date Jan 21, 2014
- ASML Netherlands B.V.
- Suzan Leonie Auer-Jongepier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning device with a reference frame for a measuring system, a...
- Patent number 5,953,105
- Issue date Sep 14, 1999
- U.S. Philips Corporation
- Gerard Van Engelen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LASER FOCUSSING MODULE
- Publication number 20220206397
- Publication date Jun 30, 2022
- ASML NETHERLANDS B.V.
- Ruud Antonius Catharina Maria BEERENS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POSITIONING DEVICE, CONTROL DEVICE AND CONTROL METHOD
- Publication number 20150235887
- Publication date Aug 20, 2015
- Koninklijke Philips N.V.
- Anne Johannes Wilhelmus Van Lievenoogen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Lithographic apparatus and method
- Publication number 20080186460
- Publication date Aug 7, 2008
- ASML NETHERLANDS B.V.
- Suzan Leonie Auer-Jongepier
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY