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Frank Bernhardt
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Kahla, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Method and arrangement for transporting and inspecting semiconducto...
Patent number
7,028,565
Issue date
Apr 18, 2006
Leica Microsystems Jena GmbH
Andreas Birkner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Arrangement and method for the identification of substrates
Patent number
6,845,174
Issue date
Jan 18, 2005
Leica Microsystems Jena GmbH
Dominik Grau
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and arrangement for transporting and inspecting semiconducto...
Patent number
6,789,436
Issue date
Sep 14, 2004
Leica Microsystems Jena GmbH
Andreas Birkner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and arrangement for transporting and inspecting semiconducto...
Patent number
6,553,850
Issue date
Apr 29, 2003
Leica Microsystems Jena GmbH
Andreas Birkner
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Method and arrangement for transporting and inspecting semiconducto...
Publication number
20040149055
Publication date
Aug 5, 2004
LEICA MICROSYSTEMS JENA GmbH
Andreas Birkner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and arrangement for transporting and inspecting semiconducto...
Publication number
20030140716
Publication date
Jul 31, 2003
LEICA MICROSYSTEMS JENA GmbH
Andreas Birkner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Arrangement for wafer inspection
Publication number
20020187035
Publication date
Dec 12, 2002
LEICA MICROSYSTEMS JENA GmbH
Kersten Schaefer
G01 - MEASURING TESTING
Information
Patent Application
Arrangement and method for the identification of substrates
Publication number
20020097905
Publication date
Jul 25, 2002
LEICA MICROSYSTEMS JENA GmbH
Dominik Grau
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Method and arrangement for transporting and inspecting semiconducto...
Publication number
20020095999
Publication date
Jul 25, 2002
LEICA MICROSYSTEMS JENA GmbH
Andreas Birkner
H01 - BASIC ELECTRIC ELEMENTS