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Frank Bornebroek
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Eindhoven, NL
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last 30 patents
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Patent Grant
Method of optimizing a die size, method of designing a pattern devi...
Patent number
8,642,235
Issue date
Feb 4, 2014
ASML Netherlands B.V.
Petar Veselinovic
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device inspection method and apparatus using an asymmetric marker
Patent number
7,112,813
Issue date
Sep 26, 2006
ASML Netherlands B.V.
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic projection apparatus with an alignment system for alig...
Patent number
6,297,876
Issue date
Oct 2, 2001
ASM Lithography B.V.
Frank Bornebroek
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
METHOD OF OPTIMIZING A DIE SIZE, METHOD OF DESIGNING A PATTERN DEVI...
Publication number
20120308921
Publication date
Dec 6, 2012
ASML NETHERLANDS B.V.
Petar Veselinovic
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Device inspection
Publication number
20040129900
Publication date
Jul 8, 2004
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY