Frank Bose

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Wettingen, CH

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Patents Grantslast 30 patents

Information Patent Grant
Coil configurations for improved uniformity in inductively coupled...
- Patent number 5,578,165
- Issue date Nov 26, 1996
- LSI Logic Corporation
- Roger Patrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Power control and delivery in plasma processing equipment
- Patent number 5,556,549
- Issue date Sep 17, 1996
- LSI Logic Corporation
- Roger Patrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Uniform and repeatable plasma processing
- Patent number 5,474,648
- Issue date Dec 12, 1995
- LSI Logic Corporation
- Roger Patrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
End-point detection in plasma etching by monitoring radio frequency...
- Patent number 5,407,524
- Issue date Apr 18, 1995
- LSI Logic Corporation
- Roger Patrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coil configurations for improved uniformity in inductively coupled...
- Patent number 5,401,350
- Issue date Mar 28, 1995
- LSI Logic Corporation
- Roger Patrick
- H01 - BASIC ELECTRIC ELEMENTS