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FRANK CHANG
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SAN JOSE, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
High temperature filter for CVD apparatus
Patent number
6,635,114
Issue date
Oct 21, 2003
Applied Material, Inc.
Jun Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for improved control of process and purge mate...
Patent number
6,358,323
Issue date
Mar 19, 2002
Applied Materials, Inc.
John Schmitt
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vaporization and deposition apparatus
Patent number
6,258,170
Issue date
Jul 10, 2001
Applied Materials, Inc.
Sasson Somekh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Chemical vapor deposition vaporizer
Patent number
6,210,485
Issue date
Apr 3, 2001
Applied Materials, Inc.
Jun Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Liquid delivery system
Patent number
6,096,134
Issue date
Aug 1, 2000
Applied Materials, Inc.
Jun Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vaporization apparatus and process
Patent number
6,082,714
Issue date
Jul 4, 2000
Applied Materials, Inc.
Charles Dornfest
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Shielded substrate support for processing chamber
Patent number
5,589,003
Issue date
Dec 31, 1996
Applied Materials, Inc.
Jun Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
Assembly and method for delivering a reactant material onto a subst...
Publication number
20070166459
Publication date
Jul 19, 2007
Advanced Micro-Fabrication Equipment, Inc.
Frank P. Chang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HIGH TERMPERATURE FILTER
Publication number
20030033978
Publication date
Feb 20, 2003
JUN ZHAO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...