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Jena, DE
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last 30 patents
Information
Patent Grant
Arrangement for radiation generation by means of a gas discharge
Patent number
7,800,086
Issue date
Sep 21, 2010
XTREME Technologies GmbH
Christian Ziener
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Arrangement for the generation of extreme ultraviolet radiation by...
Patent number
7,649,187
Issue date
Jan 19, 2010
Xtreme technologies GmbH
Guido Hergenhan
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Arrangement for generating extreme ultraviolet radiation based on a...
Patent number
7,477,673
Issue date
Jan 13, 2009
Xtreme technologies GmbH
Christian Ziener
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
ARRANGEMENT FOR THE GENERATION OF EXTREME ULTRAVIOLET RADIATION BY...
Publication number
20080006783
Publication date
Jan 10, 2008
XTREME technologies GmbH;
Guido Hergenhan
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ARRANGEMENT FOR GENERATING EXTREME ULTRAVIOLET RADIATION BASED ON A...
Publication number
20070228299
Publication date
Oct 4, 2007
XTREME technologies GmbH;
Christian Ziener
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
ARRANGEMENT FOR RADIATION GENERATION BY MEANS OF A GAS DISCHARGE
Publication number
20070040511
Publication date
Feb 22, 2007
XTREME technologies GmbH;
Christian ZIENER
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method and arrangement for the efficient generation of short-wavele...
Publication number
20060215712
Publication date
Sep 28, 2006
XTREME technologies GmbH;
Christian Ziener
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR