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Frank Hunssen
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Bilthoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Method and apparatus for supporting a semiconductor wafer during pr...
Patent number
6,805,749
Issue date
Oct 19, 2004
ASM International, N.V.
Ernst Hendrik August Granneman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Method and apparatus for supporting a semiconductor wafer during pr...
Publication number
20040087168
Publication date
May 6, 2004
Ernst Hendrik August Granneman
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...