Frank Kahlenberg

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Dresden, DE

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Patents Grantslast 30 patents

Information Patent Grant
Advanced process control methods for process-aware dimension targeting
- Patent number 9,966,315
- Issue date May 8, 2018
- GLOBALFOUNDRIES Inc.
- Philipp Jaschinsky
- G05 - CONTROLLING REGULATING
Information Patent Grant
Active pad patterns for gate alignment marks
- Patent number 8,956,946
- Issue date Feb 17, 2015
- GLOBALFOUNDRIES Singapore Pte. Ltd.
- Ming Hao Tang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
ADVANCED PROCESS CONTROL METHODS FOR PROCESS-AWARE DIMENSION TARGETING
- Publication number 20180012813
- Publication date Jan 11, 2018
- GLOBALFOUNDRIES INC.
- Philipp Jaschinsky
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ACTIVE PAD PATTERNS FOR GATE ALIGNMENT MARKS
- Publication number 20140175594
- Publication date Jun 26, 2014
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Ming Hao TANG
- H01 - BASIC ELECTRIC ELEMENTS