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Frank Kahlenberg
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Dresden, DE
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last 30 patents
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Patent Grant
Advanced process control methods for process-aware dimension targeting
Patent number
9,966,315
Issue date
May 8, 2018
GLOBALFOUNDRIES Inc.
Philipp Jaschinsky
G05 - CONTROLLING REGULATING
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Patent Grant
Active pad patterns for gate alignment marks
Patent number
8,956,946
Issue date
Feb 17, 2015
GLOBALFOUNDRIES Singapore Pte. Ltd.
Ming Hao Tang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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last 30 patents
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Patent Application
ADVANCED PROCESS CONTROL METHODS FOR PROCESS-AWARE DIMENSION TARGETING
Publication number
20180012813
Publication date
Jan 11, 2018
GLOBALFOUNDRIES INC.
Philipp Jaschinsky
G06 - COMPUTING CALCULATING COUNTING
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Patent Application
ACTIVE PAD PATTERNS FOR GATE ALIGNMENT MARKS
Publication number
20140175594
Publication date
Jun 26, 2014
GLOBALFOUNDRIES SINGAPORE PTE. LTD.
Ming Hao TANG
H01 - BASIC ELECTRIC ELEMENTS