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Frank Krupa
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Phoenix, AZ, US
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Patents Grants
last 30 patents
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Patent Grant
Multiple vertical wafer cleaner
Patent number
6,678,911
Issue date
Jan 20, 2004
SpeedFam-IPEC Corporation
Frank Krupa
B08 - CLEANING
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Patent Grant
Method of removing debris from cleaning pads in work piece cleaning...
Patent number
6,461,441
Issue date
Oct 8, 2002
SpeedFam-IPEC Corporation
Yakov Epshteyn
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Method and apparatus for semiconductor wafer cleaning
Publication number
20020166569
Publication date
Nov 14, 2002
SpeedFam-IPEC Corporation
Ellis Harvey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multiple vertical wafer cleaner
Publication number
20020162181
Publication date
Nov 7, 2002
SpeedFam-IPEC Corporation
Frank Krupa
H01 - BASIC ELECTRIC ELEMENTS