Frank Li

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Danville, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Air scattering standard for light scattering based optical instrume...
- Patent number 11,016,024
- Issue date May 25, 2021
- KLA Corporation
- Frank Li
- G01 - MEASURING TESTING
Information Patent Grant
Minimizing filed size to reduce unwanted stray light
- Patent number 10,739,276
- Issue date Aug 11, 2020
- KLA-Tencor Corporation
- Donald Pettibone
- G01 - MEASURING TESTING
Information Patent Grant
System and method for compensation of illumination beam misalignment
- Patent number 10,495,579
- Issue date Dec 3, 2019
- KLA-Tencor Corporation
- Frank Li
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Air Scattering Standard for Light Scattering Based Optical Instrume...
- Publication number 20200264099
- Publication date Aug 20, 2020
- KLA-Tencor Corporation
- Frank Li
- G01 - MEASURING TESTING
Information Patent Application
Minimizing Field Size to Reduce Unwanted Stray Light
- Publication number 20190137411
- Publication date May 9, 2019
- KLA-Tencor Corporation
- Donald Pettibone
- G01 - MEASURING TESTING
Information Patent Application
System and Method for Compensation of Illumination Beam Misalignment
- Publication number 20170336329
- Publication date Nov 23, 2017
- KLA-Tencor Corporation
- Frank Li
- G01 - MEASURING TESTING