Frank Marianek

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Oberkochen, DE

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Patents Grantslast 30 patents

Information Patent Grant
Optical system of an illumination device of a projection exposure a...
- Patent number 8,068,279
- Issue date Nov 29, 2011
- Carl Zeiss SMT GmbH
- Karl-Heinz Schuster
- G02 - OPTICS
Information Patent Grant
Device for the low-deformation support of an optical element and me...
- Patent number 6,441,975
- Issue date Aug 27, 2002
- Carl-Zeiss-Stiftung
- Michael Ebert
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL SYSTEM OF AN ILLUMINATION DEVICE OF A PROJECTION EXPOSURE A...
- Publication number 20070217013
- Publication date Sep 20, 2007
- Carl Zeiss SMT AG
- Karl-Heinz Schuster
- G02 - OPTICS