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Frank-Michael Kamm
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Unterhaching, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Reflection mask, use of the reflection mask and method for fabricat...
Patent number
7,588,867
Issue date
Sep 15, 2009
Infineon Technologies AG
Frank-Michael Kamm
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
System and method for projecting a pattern from a mask onto a subst...
Patent number
7,489,386
Issue date
Feb 10, 2009
Qimonda AG
Frank-Michael Kamm
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for determining local variation of the reflect...
Patent number
7,408,646
Issue date
Aug 5, 2008
Infineon Technologies AG
Jenspeter Rau
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for determining an optimal absorber stack geometry of a lith...
Patent number
7,376,512
Issue date
May 20, 2008
Infineon Technologies AG
Stefan Hirscher
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Reflection mask for projecting a structure onto a semiconductor waf...
Patent number
7,166,393
Issue date
Jan 23, 2007
Infineon Technologies AG
Frank-Michael Kamm
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method for determining an optimal absorber stack geometry of a lith...
Patent number
7,094,507
Issue date
Aug 22, 2006
Infineon Technologies AG
Stefan Hirscher
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method for patterning a mask layer and semiconductor product
Patent number
7,078,135
Issue date
Jul 18, 2006
Infineon Technologies AG
Frank-Michael Kamm
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for fabricating a photomask for an integrated circuit and co...
Patent number
7,073,969
Issue date
Jul 11, 2006
Infineon Technologies, AG
Frank-Michael Kamm
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Reflective mirror for lithographic exposure and production method
Patent number
7,060,399
Issue date
Jun 13, 2006
Infineon Technologies AG
Frank-Michael Kamm
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method and configuration for compensating for unevenness in the sur...
Patent number
6,841,786
Issue date
Jan 11, 2005
Infineon Technologies AG
Frank-Michael Kamm
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Large-area membrane mask and method for fabricating the mask
Patent number
6,835,508
Issue date
Dec 28, 2004
Infineon Technologies AG
Jörg Butschke
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of producing a perforated mask for particle radiation
Patent number
6,773,854
Issue date
Aug 10, 2004
Infineon Technologies AG
Albrecht Ehrmann
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Methods of Double Patterning, Photo Sensitive Layer Stack for Doubl...
Publication number
20090219496
Publication date
Sep 3, 2009
Frank-Michael Kamm
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for automatically generating at least one of a mask layout a...
Publication number
20080010627
Publication date
Jan 10, 2008
Thomas Muelders
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for Automatically Generating at Least One of a Mask Layout a...
Publication number
20080008972
Publication date
Jan 10, 2008
Thomas Muelders
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
System and Method for Projecting a Pattern from a Mask onto a Subst...
Publication number
20070263198
Publication date
Nov 15, 2007
Qimonda AG
Frank-Michael Kamm
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Exposure system and method for operating an exposure system
Publication number
20070075276
Publication date
Apr 5, 2007
Christoph Nolscher
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EUV reflection mask and method for producing it
Publication number
20060292459
Publication date
Dec 28, 2006
Frank-Michael Kamm
B82 - NANO-TECHNOLOGY
Information
Patent Application
Method for determining an optimal absorber stack geometry of a lith...
Publication number
20060275675
Publication date
Dec 7, 2006
Stefan Hirscher
B82 - NANO-TECHNOLOGY
Information
Patent Application
Method for determining an optimal absorber stack geometry of a lith...
Publication number
20060095208
Publication date
May 4, 2006
Infineon Technologies AG
Stefan Hirscher
B82 - NANO-TECHNOLOGY
Information
Patent Application
Reflection mask, use of the reflection mask and method for fabricat...
Publication number
20050287447
Publication date
Dec 29, 2005
Frank-Michael Kamm
B82 - NANO-TECHNOLOGY
Information
Patent Application
Method and apparatus for determining local variation of the reflect...
Publication number
20050195414
Publication date
Sep 8, 2005
Jenspeter Rau
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Reflective mirror for lithographic exposure and production method
Publication number
20050027905
Publication date
Feb 3, 2005
Frank-Michael Kamm
B82 - NANO-TECHNOLOGY
Information
Patent Application
Method for fabricating a photomask for an integrated circuit and co...
Publication number
20040198047
Publication date
Oct 7, 2004
Infineon Technologies AG
Frank-Michael Kamm
B82 - NANO-TECHNOLOGY
Information
Patent Application
Reflection mask for projecting a structure onto a semiconductor waf...
Publication number
20040106051
Publication date
Jun 3, 2004
Frank-Michael Kamm
B82 - NANO-TECHNOLOGY
Information
Patent Application
Method for patterning a mask layer and semiconductor product
Publication number
20040081898
Publication date
Apr 29, 2004
Frank-Michael Kamm
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Protective device for lithographic masks and method of using lithog...
Publication number
20040067424
Publication date
Apr 8, 2004
Christof Matthias Schilz
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and configuration for compensating for unevenness in the sur...
Publication number
20040041102
Publication date
Mar 4, 2004
Frank-Michael Kamm
B82 - NANO-TECHNOLOGY
Information
Patent Application
Reflective mirror for lithographic exposure and production method
Publication number
20040030814
Publication date
Feb 12, 2004
Frank-Michael Kamm
B82 - NANO-TECHNOLOGY
Information
Patent Application
Method of producing a perforated mask for particle radiation
Publication number
20030059689
Publication date
Mar 27, 2003
Albrecht Ehrmann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Large-area membrane mask and method for fabricating the mask
Publication number
20030031939
Publication date
Feb 13, 2003
Jorg Butschke
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY