Frank Mueller

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Freising, DE

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Patents Grantslast 30 patents

Information Patent Grant
Wafer clamp assembly for holding a wafer during a deposition process
- Patent number 8,795,479
- Issue date Aug 5, 2014
- Texas Instruments Deutschland GmbH
- Hermann Bichler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cathodic sputtering chamber for applying material to the surface of...
- Patent number 6,682,635
- Issue date Jan 27, 2004
- Texas Instruments Incorporated
- Hermann Bichler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
WAFER CLAMP ASSEMBLY FOR HOLDING A WAFER DURING A DEPOSITION PROCESS
- Publication number 20140339074
- Publication date Nov 20, 2014
- Hermann Bichler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER CLAMP ASSEMBLY FOR HOLDING A WAFER DURING A DEPOSITION PROCESS
- Publication number 20070012561
- Publication date Jan 18, 2007
- TEXAS INSTRUMENTS DEUTSCHLAND, GMBH
- Hermann Bichler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cathodic sputtering chamber for applying material to the surface of...
- Publication number 20020162739
- Publication date Nov 7, 2002
- Hermann Bichler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...