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Frank Schaeffer
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Tuebingen, DE
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last 30 patents
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Patent Grant
Micromechanical component and corresponding production method
Patent number
7,833,405
Issue date
Nov 16, 2010
Robert Bosch GmbH
Hubert Benzel
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Semiconductor component having a first earlier structure differing...
Patent number
6,972,447
Issue date
Dec 6, 2005
Robert Bosch GmbH
Hubert Benzel
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
Semiconductor component and method
Publication number
20040048430
Publication date
Mar 11, 2004
Hubert Benzel
B81 - MICRO-STRUCTURAL TECHNOLOGY